Daniel F Richardson

US Patent:

6547458, Apr 15, 2003

Filed:

Nov 24, 1999

Appl. No.:

09/449338

Inventors:

Alan C. Janos - Darnstown MD
Andre G. Cardoso - Laurel MD
Daniel B. Richardson - Westminster MD

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

G03D 500

US Classification:

396611, 15634525, 156250, 1565592, 156356, 156369, 156118, 156723 R

Abstract:

The present invention is directed to optimization of the optical detection system for the use of optical emission spectroscopy in end-point detection. The optimization specifically addresses the needs of a radiant heated wafer system in a downstream process chamber environment. The present invention maximizes signal light from relevant reactions, maximizes signal-to noise and signal-to-background ratios, utilizes very small diagnostics access, collects light from the region of most intense light emission from endpoint processes, collects light from representative parts of an entire wafer with just one diagnostic access port to ensure complete end-point, and eliminates light signals from sources other than the wafer.

US Patent:

56556314, Aug 12, 1997

Filed:

Mar 7, 1995

Appl. No.:

8/399529

Inventors:

Daniel B. Richardson - Gambrills MD

International Classification:

B60T 300
A63H 2700

US Classification:

188 32

Abstract:

An adjustable chock for radio-controlled model airplanes, having two affixed restraining members that can adjustably seat against the front and rear side of model airplanes landing gear, thus preventing its unintentional movement.