David S Corey

US Patent:

6950716, Sep 27, 2005

Filed:

Aug 13, 2001

Appl. No.:

09/927444

Inventors:

Nicholas A. Ward - San Jose CA, US
Richard Danielson - Pleasanton CA, US
David B. Corey - Sandy UT, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G06F019/00

US Classification:

700121, 700 19, 700 49, 700103, 438 5

Abstract:

A semiconductor fabrication system, method and medium are disclosed. The system includes a semiconductor fabrication tool and a software application, in communication with the semiconductor fabrication tool. The semiconductor fabrication tool includes a chamber configured to perform at least one process on a semiconductor wafer. The software application is configured to determine specified qualities of the first chamber in performing the at least one process. The specified qualities are directed to at least one of: a processing time required to perform the at least one process, a rate of producing defective output products of the at least one process, a uniformity of output products of the at least one process, and a capability index of the at least one process.