Fredric D. Bailey - Golden CO Douglas A. Buchanan - Cortlandt Manor NY Alessandro C. Callegari - Yorktown Heights NY Howard M. Clearfield - Yorktown Heights NY Fuad E. Doany - Katonah NY Donis G. Flagello - Ridgefield CT Harold J. Hovel - Katonah NY Douglas C. Latulipe - Danbury CT Naftali E. Lustig - Croton-on-Hudson NY Andrew T. S. Pomerene - New Fairfield CT Sampath Purushothaman - Yorktown Heights NY Christopher M. Scherpereel - Poughquag NY David E. Seeger - Congers NY Jane M. Shaw - Ridgefield CT
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
B24B 302
US Classification:
428408
Abstract:
The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.
Diamond-Like Carbon Films From A Hydrocarbon Helium Plasma
Fredric D. Bailey - Golden CO Douglas A. Buchanan - Cortlandt Manor NY Alessandro C. Callegari - Yorktown Heights NY Howard M. Clearfield - Yorktown Heights NY Fuad E. Doany - Katonah NY Donis G. Flagello - Ridgefield CT Harold J. Hovel - Katonah NY Douglas C. Latulipe - Danbury CT Naftali E. Lustig - Croton-on-Hudson NY Andrew T. S. Pomerene - New Fairfield CT Sampath Purushothaman - Yorktown Heights NY Christopher M. Scherpereel - Poughquag NY David E. Seeger - Congers NY Jane M. Shaw - Ridgefield CT
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
B05D 306 H05H 124
US Classification:
427577
Abstract:
The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond-like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.
Name / Title
Company / Classification
Phones & Addresses
David Seeger President
Atlas ABC Corporation
David L. Seeger Principal
Seeger Construction Enterprises, Inc Construction
35825 E 149 Ct, Hudson, CO 80642 (303)8081986
David W. Seeger
SHADOW VALLEY RAVINE ESTATES CONDOMINIUM ASSOCIATION
Bethany, OKI have been employed in multiple fields and for many employers. I don't like to remain too long in one place. My most frequent employment has been as a computer... I have been employed in multiple fields and for many employers. I don't like to remain too long in one place. My most frequent employment has been as a computer programmer, analyst, software developer. I have jobs in everything from post office clerk to teacher and small business owner.