Dean P Wiberg

US Patent:

6777312, Aug 17, 2004

Filed:

Nov 2, 2001

Appl. No.:

10/005765

Inventors:

Dean V. Wiberg - La Crescenta CA

Assignee:

California Institute of Technology - Pasadena CA

International Classification:

H01L 2130

US Classification:

438464, 438458, 438459

Abstract:

Techniques for transferring a membrane from one wafer to another wafer to form integrated semiconductor devices.

US Patent:

7285844, Oct 23, 2007

Filed:

Jun 10, 2004

Appl. No.:

10/865344

Inventors:

Ken J. Hayworth - Northridge CA, US
Karl Y. Yee - Pasadena CA, US
Kirill V. Shcheglov - Los Angeles CA, US
Youngsam Bae - Gardena CA, US
Dean V. Wiberg - La Crescenta CA, US
A. Dorian Challoner - Manhattan Beach CA, US
Chris S. Peay - Alhambra CA, US

Assignee:

California Institute of Technology - Pasadena CA
The Boeing Company - Chicago IL

International Classification:

H01L 23/552

US Classification:

257659, 257660, 438455, 438456, 216 2

Abstract:

A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum package that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

US Patent:

7347095, Mar 25, 2008

Filed:

Aug 8, 2005

Appl. No.:

11/199004

Inventors:

Kirill V. Shcheglov - Los Angeles CA, US
A. Dorian Challoner - Manhattan Beach CA, US
Ken J. Hayworth - Northridge CA, US
Dean V. Wiberg - La Crescenta CA, US
Karl Y. Yee - Pasadena CA, US

Assignee:

The Boeing Company - Chicago IL
California Institute of Technology - Pasadena CA

International Classification:

G01P 9/04

US Classification:

7350413, 7350412

Abstract:

The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.

US Patent:

7396478, Jul 8, 2008

Filed:

Sep 5, 2007

Appl. No.:

11/850458

Inventors:

Ken J. Hayworth - Northridge CA, US
Karl Y. Yee - Pasadena CA, US
Kirill V. Shcheglov - Los Angeles CA, US
Youngsam Bae - Gardena CA, US
Dean V. Wiberg - La Crescenta CA, US
A. Dorian Challoner - Manhattan Beach CA, US
Chris S. Peay - Alhambra CA, US

Assignee:

California Institute of Technology - Pasadena CA
The Boeing Company - Chicago IL

International Classification:

B44C 1/22
H01L 21/00

US Classification:

216 2, 216 13, 216 41, 438455, 438456, 257659, 257660

Abstract:

A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum packaging method that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

US Patent:

6281494, Aug 28, 2001

Filed:

May 22, 2000

Appl. No.:

9/576596

Inventors:

Ara Chutjian - La Crescenta CA
Michael Hecht - Los Angeles CA
Otto Orient - Glendale CA
Dean Wiberg - La Crescenta CA
Reid A. Brennen - San Francisco CA

Assignee:

California Institute of Technology - Pasadena CA

International Classification:

H01J 4942

US Classification:

250292

Abstract:

The present invention provides a quadrupole mass spectrometer and an ion filter for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.

US Patent:

61880671, Feb 13, 2001

Filed:

Nov 8, 1999

Appl. No.:

9/436052

Inventors:

Ara Chutjian - La Crescenta CA
Michael Hecht - Los Angeles CA
Otto Orient - Glendale CA
Dean Wiberg - La Crescenta CA
Reid A. Brennen - San Francisco CA

Assignee:

California Institute of Technology - Pasadena CA

International Classification:

H01J 4942

US Classification:

250292

Abstract:

The present invention provides a quadrupole mass spectrometer and an ion filter for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and aligrnent for use in a final quadrupole mass spectrometer device.

US Patent:

6157029, Dec 5, 2000

Filed:

Jun 3, 1998

Appl. No.:

9/089769

Inventors:

Ara Chutjian - La Crescenta CA
Michael Hecht - Los Angeles CA
Otto Orient - Glendale CA
Dean Wiberg - La Crescenta CA
Reid A. Brennen - San Francisco CA

Assignee:

California Institute of Technology - Pasadena CA

International Classification:

H01J 4942

US Classification:

250292

Abstract:

The present invention provides a quadrupole mass spectrometer and an ion filter for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.