Donald B Stephens

US Patent:

6430841, Aug 13, 2002

Filed:

May 26, 2000

Appl. No.:

09/580825

Inventors:

Jonathan Borkowski - Sunnyvale CA
Oliver David Jones - Watsonville CA
Kenneth C. McMahon - Morgan Hill CA
Scott Petersen - Scotts Valley CA
Donald Stephens - Santa Cruz CA
Yassin Mehmandoust - Santa Cruz CA
James M. Olivas - Scotts Valley CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

F26B 2108

US Classification:

34557, 34196, 34197, 34228, 34527, 134 61, 1341044, 134137

Abstract:

Liquid is removed from batches of substrates by apparatus and methods for drying substrates that have been wet in an elongated liquid bath. The substrates are moved relative to the bath and an elongated gas-filled volume at rates of movement selected according to the location of the batches of substrates in the bath or the volume. As an example, the substrates and the bath are separated at a controlled rate to form a thin layer of liquid on each substrate as each substrate enters the gas-filled volume. The gas-filled volume is defined by an elongated hot chamber and hot gas directed into the volume and across the substrates and out of the volume continuously transfers thermal energy to the substrates. The flow rate of the gas into the volume is related to introduction of the substrates into the bath to avoid disturbing the liquid in the bath. The thermal energy transferred to the substrates in the volume evaporates the thin layer from the substrates without decreasing the rate of separation of the substrates and the bath below the maximum rate of such separation at which a meniscus will form between the bath and the surface of one of the substrates during such separation.

US Patent:

6588043, Jul 8, 2003

Filed:

May 26, 2000

Appl. No.:

09/580367

Inventors:

David T. Frost - San Jose CA
Oliver David Jones - Watsonville CA
Scott Petersen - Scotts Valley CA
Donald Stephens - Santa Cruz CA
Anthony Jones - Ben Lomond CA
Bryan Riley - San Jose CA

Assignee:

Lam Research Corporation - Fremont CA
Oliver Design, Inc. - Scotts Valley CA

International Classification:

B08B 102

US Classification:

15 77, 15 883, 198733, 198734, 414935

Abstract:

A cascaded wafer scrubbing system and method are provided. The cascaded wafer scrubbing system includes an array of rows of brush pairs. Each row includes a plurality of counter-rotating brush pairs that are arranged horizontally and longitudinally, and configured to receive and process a wafer in a vertical orientation through wafer preparation zones defined by each pair of brushes. Below and between the pairs of brushes is a track that is configured to apply a rotation to the wafer and to transition the wafer in a vertical orientation through the brush pairs. Nozzles dispense fluids on and over the brush pairs, and the brush pairs are configured such that fluids are dispensed through the brush pairs. Nozzles dispense a curtain of fluid between each wafer preparation zone, and the cascaded wafer scrubbing system is configured to progress from dirtiest to cleanest as the wafer transitions through each wafer preparation zone.

US Patent:

6625835, Sep 30, 2003

Filed:

May 26, 2000

Appl. No.:

09/580827

Inventors:

David T. Frost - San Jose CA
Oliver David Jones - Watsonville CA
Scott Petersen - Scotts Valley CA
Donald Stephens - Santa Cruz CA
Anthony Jones - Ben Lomond CA
Bryan Riley - San Jose CA

Assignee:

Lam Research Corporation - Fremont CA
Oliver Design, Inc. - Scotts Valley CA

International Classification:

B08B 102

US Classification:

15 77, 15 883, 134902, 198733, 198734, 414935, 451336

Abstract:

A cascaded disk scrubbing system and method are provided. The cascaded disk scrubbing system includes an array of rows of brush pairs. Each row includes a plurality of counter-rotating brush pairs that are arranged horizontally and longitudinally, and configured to receive and process a disk in a vertical orientation through disk preparation zones defined by each pair of brushes. Below and between the pairs of brushes is a track that is configured to apply a rotation to the disk and to transition the disk in a vertical orientation through the brush pairs. Nozzles dispense fluids on and over the brush pairs, and the brush pairs are configured such that fluids are dispensed through the brush pairs. Nozzles dispense a curtain of fluid between each disk preparation zone, and the cascaded disk scrubbing system is configured to progress from dirtiest to cleanest as the disk transitions through each disk preparation zone.

US Patent:

6625901, Sep 30, 2003

Filed:

Nov 20, 2000

Appl. No.:

09/717163

Inventors:

Yassin Mehmandoust - Santa Cruz CA
Donald E. Stephens - Santa Cruz CA

Assignee:

Oliver Design, Inc. - Scotts Valley CA

International Classification:

F26B 300

US Classification:

34476, 34493, 34497, 34527, 34228, 134 61, 134137, 134902

Abstract:

A dryer for drying a substrate includes: a bath containing a fluid; a chamber; and an isopropyl alcohol delivery system supplying isopropyl alcohol vapor to the interface between the substrate and the fluid when the substrate is removed from the fluid of the bath into the chamber. The isopropyl alcohol vapor is supplied perpendicularly to a vertical axis of the substrate. The dryer further includes a chamber environment control system that supplies a gas into the chamber to dry the substrate and controls temperature and humidity in the chamber and a chamber heater attached to the chamber to transfer thermal energy into the chamber. A drying method includes: immersing a substrate into a fluid contained in a bath; removing the substrate from the fluid into a chamber; and supplying isopropyl alcohol vapor into an interface between the substrate and the fluid perpendicularly to a vertical axis of the substrate. The method further includes: supplying a gas into the chamber to dry the substrate and to control temperature and humidity in the chamber; and heating the chamber to transfer thermal energy into the chamber and the substrate.

US Patent:

44380704, Mar 20, 1984

Filed:

Dec 4, 1981

Appl. No.:

6/327379

Inventors:

Donald E. Stephens - Palo Alto CA
Thomas D. Sharples - Atherton CA

Assignee:

Beckman Instruments, Inc. - Fullerton CA

International Classification:

G01N 3108

US Classification:

422 70

Abstract:

An elongate straight column for use as a reactor in an analytical instrument. The column contains inert packed material which provides for the necessary flow path length for a fluid stream entering the reactor. Fittings are incorporated onto the ends of the column in such a manner that their width is no larger than the width of the column. The column configuration for a reactor allows more versatility in the type of temperature regulator mechanisms used to heat and cool the reactor.

US Patent:

42947995, Oct 13, 1981

Filed:

Apr 24, 1980

Appl. No.:

6/143212

Inventors:

Donald E. Stephens - Palo Alto CA
John T. Taylor - Santa Clara CA

Assignee:

Beckman Instruments, Inc. - Fullerton CA

International Classification:

G01N 3122
G01N 3108
G01J 346

US Classification:

422 62

Abstract:

A temperature regulating apparatus which increases optical sensitivity and resolution of a liquid in a reaction chamber by heating while providing rapid cooling to prevent vaporization of the liquid within the reaction chamber. The apparatus includes a heat exchanger containing the reaction chamber and an insulating chamber surrounding the heat exchanger. A coolant may be passed through the heat exchanger to prevent boiling should a change in liquid flow make such occurrence likely. The change in liquid flow is monitored by an analyzer monitor, and the temperature in the reaction chamber is changed accordingly.

US Patent:

45349410, Aug 13, 1985

Filed:

Dec 4, 1981

Appl. No.:

6/327372

Inventors:

Donald E. Stephens - Palo Alto CA
Robert J. Ehret - Los Altos CA

Assignee:

Beckman Instruments, Inc. - Fullerton CA

International Classification:

G01N 3108

US Classification:

422 70

Abstract:

A temperature control system used to precisely and accurately control the temperature of a fluid stream in an analytical system designed for investigation of the chemical constituents of the fluid stream. One example of use is in chromatography such as for the chromatographic column in an amino acid analyzer system. The temperature control system utilizes a set of thermoelectric modules to transfer heat between a thermoconductive block which holds the chromatographic column and an air exchange heat sink which obtains heat from or disposes heat into ambient air as required. The control system regulates the temperature at a very rapid rate in order to minimize the recycle time of the instrument.

US Patent:

43721508, Feb 8, 1983

Filed:

Jun 5, 1980

Appl. No.:

6/156718

Inventors:

Donald E. Stephens - Palo Alto CA
Robert J. Ehret - Los Altos CA

Assignee:

Beckman Instruments, Inc. - Fullerton CA

International Classification:

G01M 328

US Classification:

73 405R

Abstract:

A method and apparatus for monitoring flow rate through a conduit. A flow number indicative of the flow rate of a liquid through the conduit is compared with a preselected reference number. The actual liquid flow through the conduit provides a clocking signal which determines the time span during which a count signal, indicative of the intended flow rate into the conduit, is accumulated thereby providing the flow number.