Dong Myung Kim

US Patent:

7790574, Sep 7, 2010

Filed:

Dec 13, 2005

Appl. No.:

11/301527

Inventors:

Ajeet Rohatgi - Atlanta GA, US
Dong Seop Kim - Atlanta GA, US
Kenta Nakayashiki - Smyrna GA, US
Brian Rounsaville - Stockbridge GA, US

Assignee:

Georgia Tech Research Corporation - Atlanta GA

International Classification:

H01L 21/00

US Classification:

438460, 148 333, 148 335, 438558, 438560

Abstract:

Disclosed are various embodiments that include a process, an arrangement, and an apparatus for boron diffusion in a wafer. In one representative embodiment, a process is provided in which a boric oxide solution is applied to a surface of the wafer. Thereafter, the wafer is subjected to a fast heat ramp-up associated with a first heating cycle that results in a release of an amount of boron for diffusion into the wafer.

US Patent:

20030019596, Jan 30, 2003

Filed:

Apr 17, 2001

Appl. No.:

09/835365

Inventors:

Arthur Ragauskas - Lawrenceville GA, US
Dong Kim - Tucker GA, US

International Classification:

D21C003/20
D21C003/00

US Classification:

162/072000, 162/078000, 162/080000

Abstract:

A novel process for bleaching cellulosic pulp is disclosed which provides improvements in pulp brightness and delignification without negatively impacting physical properties of the pulp. Specifically, a process is disclosed in which kraft pulp is treated with at least one of each of an oxidizing agent, an alkaline agent, and a metal substituted xerogel in a bleaching stage to improve brightness and delignification of softwood, hardwood, or recycled pulp. In a preferred embodiment, a process is disclosed which uses at least one metal substituted xerogel as a catalyst in an alkaline peroxide bleaching stage to improve kraft pulp brightness and delignification. Pulps bleached according to the process of the present invention are also disclosed.