Tokyo Electron - Brussels Area, Belgium since Oct 2012
Etch Process Engineer
GLOBALFOUNDRIES Jan 2011 - Oct 2012
MTS Process Engineer, CFM
Tokyo Electron Apr 2010 - Jan 2011
Senior Process Engineer
The Scooter Store Nov 2007 - Apr 2010
Director
Samsung Austin Semiconductor Apr 1996 - Oct 2007
Senior Manager
Education:
The University of Texas at San Antonio 1995
BS, Biology, Chemistry
Skills:
Process Engineering Semiconductors Manufacturing Process Improvement Spc Semiconductor Industry Design of Experiments Product Development Cross Functional Team Leadership Project Management Failure Analysis Six Sigma Product Management Electronics Thin Films Materials Science Jmp Silicon Nanotechnology Management Process Simulation Metrology Process Integration R&D Sales Lean Manufacturing Engineering Management Engineering Leadership Ic Etching Strategic Planning Start Ups Characterization Yield Statistical Process Control Continuous Improvement Cvd Medical Devices New Business Development Root Cause Analysis Fmea Integration Project Planning Troubleshooting
Us Patents
Method And System For Performing Post-Etch Annealing Of A Workpiece
- Tokyo, JP Doni Parnell - Albany NY, US Shigeru Tahara - Auderghem, BE Toru Ishii - Dublin, IE
International Classification:
H01L 43/12
Abstract:
A method for performing post-etch annealing of a workpiece in an annealing system is described. In particular, the method includes disposing one or more workpieces in an annealing system, each of the one or more workpieces having a multilayer stack of thin films that has been patterned using an etching process sequence to form an electronic device characterized by a cell critical dimension (CD), wherein the multilayer stack of thin films includes at least one patterned layer containing magnetic material. Thereafter, the patterned layer containing magnetic material on the one or more workpieces is annealed in the annealing system via an anneal process condition, wherein the anneal process condition is selected to adjust a property of the patterned layer containing magnetic material.
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