A process for drying a polymeric material present on a substrate is provided. Temperatures of the polymeric material is measured and the ambient temperature in the vicinity of the substrate. A temperature of the substrate is also measured. A variation in the measured ambient temperature is detected. The substrate temperature, polymeric temperature, ambient temperature or a substrate drying spin speed is adjusted in response to the detected variation in the measured ambient temperature.
Method For Two Dimensional Adaptive Process Control Of Critical Dimensions During Spin Coating Process
Emir Gurer - Scotts Valley CA Tom Zhong - Santa Clara CA John W. Lewellen - San Jose CA Eddie Lee - Cupertino CA
Assignee:
Silicon Valley Group - San Jose CA
International Classification:
F26B 508 B05D 312
US Classification:
34317
Abstract:
A process for drying a polymeric material present on a substrate is provided. Temperatures of the polymeric material is measured and the ambient temperature in the vicinity of the substrate. A temperature of the substrate is also measured. A variation in the measured ambient temperature is detected. The substrate temperature, polymeric temperature, ambient temperature or a substrate drying spin speed is adjusted in response to the detected variation in the measured ambient temperature.
Y.C. Cable 2007 - 2012
Engineer
PQI 2004 - 2007
Engineer
Hewlett-Packard - Rancho Bernardo, San Diego, California Sep 2002 - Dec 2002
EE Project Design Team Member
King Star Computer 1998 - 2000
Computer Technician
Education:
University of California, San Diego 2000 - 2004
Electrical Engineering
Interests:
gym, movies, tv series, country, pop
Awards:
Cum Laude UCSD Provost’s Honor UCSD Winter 01, Spring 01, Fall 01, Winter 02, Spring 02, Fall 02
Vice President, Manufacturing Program at Crocus Technology
Location:
Santa Clara, California
Industry:
Semiconductors
Work:
Crocus Technology - Santa Clara, California since Sep 2009
Vice President, Manufacturing Program
Spansion Apr 2004 - Sep 2009
Vice President of Engineering Operation and Allliances
Advanced Micro Devices 2003 - 2004
Extermal Manufacturing
Genus Jul 2000 - Apr 2004
Executive VP of Technolgy, Chief IP Office
ASML ( former Silicon Valley Group Jan 1997 - Jul 2000
Vice President of Technologhy
Education:
University of Minnesota-Twin Cities 1979 - 1981
Master Eng, Chemical Engineering and Material Science
St. John's University 1970 - 1974
Eddie Lee's official profile including the latest music, albums, songs, music videos and more updates.
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Eddie Lee
Work:
Center for Complexity and Collective Computation - Researcher (2013) Princeton University Department of Physics - Researcher (2011-2013) MCDCC - Intern (2006-2006) USUHS - Lab Assistant (2009-2009) ISCIII - Lab Assistant (2010-2010)
Education:
Princeton University - Physics, Richard Montgomery High School, DuFief, Cold Spring, Wheaton Woods
About:
Researcher at the intersection of physics and sociology--using lessons from physical models, ideas, intuitions to look for general principles in human behavior
Her oldest son, Dr. Eddie Lee, has taken over for his mom as interim CEO. Trained as an internist, he has spent the last three years working part-time as a physician so he could serve as BCD's vice president. In 2019, he ramped up his BCD duties to full-time. Without knowing it, he had been apprenti
Date: Aug 14, 2020
Category: Headlines
Source: Google
Jeremy Lin: Three games removed from bench, ready to take on Lakers
Hed laugh at that one, said Eddie Lee, Lins friend who used to cram into Lins dorm room as he led Bible study at Harvard. I really dont think anyone expected this to happen. One day hes on the bench, and the next day hes a sensation.
Eddie Lee Stone, 50, of 112 Roosevelt Street, was arrested and charged with one count of burglary, malicious injury to property, larceny and intent to ...
As Scott and the Jarretts pondered their next move, mail carrier Eddie Lee drove up, inquiring about the ice and turning around before he and his vehicle ...
Mr. Norfleet was born May 12, 1946, in Marian, Ala., a son of Eddie L. Norfleet and Ella L. Clancy Howard. Eddie was a 1964 graduate of Campbell Memorial ...
On Wednesday, Caddo Parish Sheriff's deputies arrested Winslow's ex-boyfriend, Eddie Lee Jackson. Deputies say Jackson is now charged with 2nd degree ...
Caddo Sheriff gives update on missing Oil City woman