Edward D. Buker - Underhill Center VT Edward W. Conrad - Jefforsonville VT James M. Leas - South Burlington VT
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
B08B 704
US Classification:
134 33
Abstract:
A megasonic liquid stream semiconductor wafer cleaning apparatus and method uniformly removes debris from all points on the surface of a semiconductor wafer. The wafer is rotated about a proscribed axis while the means for producing focused megasonic waves and a liquid stream of cleaning fluid is focused on the wafer so as to apply sufficient energy to clean the wafer yet not cause damage to the electronic circuity embedded in the wafer. A method is provided for moving the outlet port providing the stream of megasonic cleaning fluid across the wafer so that the amount of energy applied to any area of the wafer is relatively constant.
Christine Ann Anderson - Frisco CO Edward Daniel Buker - Underhill Center VT John Edward Cronin - Milton VT Gloria Jean Kerszykowski - Williston VT David Charles Thomas - Richmond VT
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 21283 H01L 21311
US Classification:
438629
Abstract:
A process for making metal features in an insulator layer in integrated circuits is disclosed. The process involves depositing an antireflective coating layer of a material such as TiN over the insulator layer patterning both the ARC and the insulator with a series of channels or apertures vias and depositing a metal such as tungsten over the ARC and in the channels and apertures. The metal can then be planarized by CMP using the insulator as an etch top.
Edward Buker 1967 graduate of Burlington High School in Burlington, VT is on Classmates.com. See pictures, plan your class reunion and get caught up with Edward and other high ...