Edward D. Parent - Hamilton MA Thomas B. McDonough - San Jose CA
Assignee:
GTE Sylvania Incorporated - Stamford CT
International Classification:
H01B 104
US Classification:
252516
Abstract:
An electrically conductive boat for the vacuum evaporation of metals comprises a refractory composition consisting essentially of a conductor of titanium diboride and/or zirconium diboride, a coconductor of silicon carbide and an insulator of boron nitride.
A hot pressed intermetallic composite comprises titanium diboride and boron nitride and an effective amount of tungsten to reduce erosion of the composite and reduce the rate at which the electrical resistivity of the composite changes during its use.
Evaporating Boat Having Parallel Inclined Cavities
Edward D. Parent - Hamilton MA Oliver S. Smith - Stratham NH
Assignee:
GTE Products Corporation - Stamford CT
International Classification:
C23C 1424 C23C 1426
US Classification:
118726
Abstract:
A self-resistance-heated electrically-conductive refractory evaporating boat has inclined cavities on its two horizontal surfaces, the cavities being parallel to each other.
Theodore J. Pricenski - Ipswich MA Edward D. Parent - Hamilton MA
Assignee:
GTE Products Corporation - Stamford CT
International Classification:
F22B 128
US Classification:
219275
Abstract:
An evaporation heater having a wire wound into a coil and a support wire which extends from one arm of the wire outside of the coil, in spaced proximity therewith, to a central position within the coil but out of electric contact therewith is disclosed. An annular pellet of evaporant material is positioned over the wire support arm within the heater coil but out of contact therewith. The atmosphere around the heater coil and pellet is substantially evacuated and current is directed through such coil to apply radiant heat to the pellet to evaporate same. Because the heater coil is in spaced proximity with the pellet of evaporant material and not in contact therewith, chemical reaction therebetween or erosion is avoided, and a durable evaporation heater of uncomplex construction is provided.
Ernest A. Davey - Peabody MA Norman A. Mathieu - Exeter NH Edward D. Parent - Hamilton MA
Assignee:
GTE Sylvania Incorporated - Danvers MA
International Classification:
A61L 300
US Classification:
219275
Abstract:
In an evaporation source for the vacuum deposition of sublimating material, the evaporant surrounds, and is spaced from, an axially disposed coiled tungsten heater. The evaporated material passes out of the source in an upward direction to deposit on a substrate located above the source.
Method Of Making Refractory Metal-Ceramic Crucible
A crucible for containing metal to be evaporated for vacuum deposition is manufactured by winding refractory metal wire into the shape of a helical basket coil. The coil is electrophoretically coated with a primer coat of alumina and is then flame or plasma sprayed with alumina to form the crucible.
Edward D. Parent - Hamilton MA Charles S. Purinton - Byfield MA Charles W. Sutter - Spanaway WA
Assignee:
GTE Products Corporation - Stamford CT
International Classification:
B22F 100
US Classification:
75228
Abstract:
A refractory metal silicide sputtering target is made by reacting refractory metal and silicon to about 70 to 90% completion of the reaction, comminuting the material, and then vacuum hot pressing the comminuted material to a high density compact.
Edward D. Parent - Hamilton MA Edwin J. Spooner - Exeter NH Robert F. Scoledge - Raymond NH
Assignee:
GTE Products Corporation - Stamford CT
International Classification:
C04B 3558
US Classification:
264332
Abstract:
Self-resistance heated, electrically conductive, refractory evaporating boats containing titanium diboride can be reclaimed for reuse. If there is aluminum adhering to the boats, they are first leached in hot caustic solution to remove the aluminum. After rinsing and drying, the boats are ground to powder which is then screened. The screened powder is used to manufacture new boats.
David Perry, Heidi Springthorpe, Patrick Freeman, Timothy Seward, Mike Marquis, Tony G, Jennifer Folan, Tricia Bettencou, David Romeo, Randi Snead, Victor Costa, Sarah Stuart