Feng Tian

US Patent:

8520413, Aug 27, 2013

Filed:

Aug 17, 2011

Appl. No.:

13/211892

Inventors:

Ken Tran - North Chelmsford MA, US
Feng Tian - Salem NH, US
Franklin Lee - Framingham MA, US
Wangbo Zhang - Winchester MA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

H02M 3/335

US Classification:

363 2103, 323222, 323271, 323287, 363 39

Abstract:

A power converter includes first and second circuit modules, a first capacitor, a second diode and a control module. The first circuit module includes a switching element in parallel with a first diode. The second circuit module includes a first inductor and the first circuit module. The inductor is in series with the first circuit module. The first capacitor is in parallel with the second circuit module. The second diode includes a first terminal and a second terminal, where the first terminal is in series with the second circuit module and the first capacitor, and the second terminal is coupled to a second power terminal. The control module varies one or more of the first capacitor and the first inductor based on at least one of a current of a load circuit or an input voltage. A resonating waveform is generated by a resonant circuit of the second circuit and is used by the control module to turn off the switching element under zero-current and zero-voltage conditions.

US Patent:

20080179948, Jul 31, 2008

Filed:

Feb 1, 2008

Appl. No.:

12/024734

Inventors:

Siddharth P. Nagarkatti - Acton MA, US
Yevgeniy Barskiy - Bedford MA, US
Feng Tian - Woburn MA, US
Ilya Bystryak - Salem MA, US

Assignee:

MKS INSTRUMENTS, INC. - WILMINGTON MA

International Classification:

H02J 1/10
H03G 3/20
H01J 15/04

US Classification:

307 18, 330127, 315326

Abstract:

A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

US Patent:

20100327927, Dec 30, 2010

Filed:

Jun 25, 2009

Appl. No.:

12/491538

Inventors:

Siddharth Nagarkatti - Acton MA, US
Feng Tian - Woburn MA, US
David Lam - Burlington MA, US
Abdul Rashid - Salem NH, US
Souheil Benzerrouk - Lowell MA, US
Ilya Bystryak - Salem MA, US
David Menzer - Boxford MA, US
Jack J. Schuss - Newton MA, US
Jesse E. Ambrosina - Topsfield MA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

H03K 3/84

US Classification:

327164

Abstract:

A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.

US Patent:

20120262064, Oct 18, 2012

Filed:

Feb 8, 2012

Appl. No.:

13/368920

Inventors:

Siddharth P. Nagarkatti - Acton MA, US
Yevgeniy Barskiy - Bedford MA, US
Feng Tian - Woburn MA, US
Ilya Bystryak - Salem MA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

G05F 3/02
H05H 1/46

US Classification:

31511121, 323234

Abstract:

A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

US Patent:

20120287545, Nov 15, 2012

Filed:

May 13, 2011

Appl. No.:

13/106920

Inventors:

Ken Tran - North Chelmsford MA, US
Feng Tian - Salem NH, US
Xing Chen - Lexington MA, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

H02H 3/08

US Classification:

361101

Abstract:

A switching apparatus includes a first transistor, a second transistor, a first circuit module, a first current sensor and a control circuit. The first transistor includes first, second and third terminals. The first terminal of the first transistor is coupled to a first power terminal. The third terminal of the first transistor includes a gate or base of the first transistor. The second transistor includes first, second and third terminals. The first terminal of the second transistor is coupled to a second power terminal. The second terminal of the second transistor is coupled to the second terminal of the first transistor. The third terminal of the second transistor includes a gate or base of the second transistor. The first circuit module includes an inductor in parallel with a diode. The first circuit module is connected between the first terminal of the second transistor and the second power terminal.

US Patent:

20130257301, Oct 3, 2013

Filed:

Mar 28, 2012

Appl. No.:

13/432415

Inventors:

Ken Tran - North Chelmsford MA, US
Feng Tian - Salem NH, US
Xing Chen - Lexington MA, US
Franklin Lee - Framingham MA, US

Assignee:

MKS INSTRUMENTS, INC. - Andover MA

International Classification:

H01J 37/248

US Classification:

315200 R

Abstract:

Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

US Patent:

20180233333, Aug 16, 2018

Filed:

Apr 12, 2018

Appl. No.:

15/952168

Inventors:

- Andover MA, US
Ilya Pokidov - North Reading MA, US
Feng Tian - Salem NH, US
Ken Tran - North Chelmsford MA, US
David Lam - Fitchburg MA, US
Kevin W. Wenzel - Belmont MA, US

International Classification:

H01J 37/32
B01D 53/76
H05H 1/46
B01D 53/32

Abstract:

An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.

US Patent:

20170213704, Jul 27, 2017

Filed:

Apr 10, 2017

Appl. No.:

15/484072

Inventors:

- Andover MA, US
Ilya Pokidov - North Reading MA, US
Feng Tian - Salem NH, US
Ken Tran - North Chelmsford MA, US
David Lam - Fitchburg MA, US
Kevin W. Wenzel - Belmont MA, US

International Classification:

H01J 37/32
B01D 53/32
B01D 53/76

Abstract:

An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.