Anisotropic Strain Control In Semipolar Nitride Quantum Wells By Partially Or Fully Relaxed Aluminum Indium Gallium Nitride Layers With Misfit Dislocations
Hiroaki Ohta - Goleta CA, US Feng Wu - Goleta CA, US Anurag Tyagi - Goleta CA, US Arpan Chakraborty - Goleta CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US Erin C. Young - Santa Barbara CA, US
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
H01L 29/66
US Classification:
257 14, 257E29168, 257E2109, 438 47
Abstract:
An epitaxial structure for a III-Nitride based optical device, comprising an active layer with anisotropic strain on an underlying layer, where a lattice constant and strain in the underlying layer are partially or fully relaxed in at least one direction due to a presence of misfit dislocations, so that the anisotropic strain in the active layer is modulated by the underlying layer.
Crystal Growth Of M-Plane And Semipolar Planes Of (Al, In, Ga, B)N On Various Substrates
Kwang Choong Kim - Seoul, KR Mathew C. Schmidt - Santa Barbara CA, US Feng Wu - Goleta CA, US Asako Hirai - Santa Barbara CA, US Melvin B. McLaurin - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US James S. Speck - Goleta CA, US
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA - Oakland CA
International Classification:
C30B 23/04
US Classification:
117 95
Abstract:
A method of reducing threading dislocation densities in non-polar such as a- {11-20} plane and m-{1-100} plane or semi-polar such as {10-1n} plane III-Nitrides by employing lateral epitaxial overgrowth from sidewalls of etched template material through a patterned mask. The method includes depositing a patterned mask on a template material such as a non-polar or semi polar GaN template, etching the template material down to various depths through openings in the mask, and growing non-polar or semi-polar III-Nitride by coalescing laterally from the tops of the sidewalls before the vertically growing material from the trench bottoms reaches the tops of the sidewalls. The coalesced features grow through the openings of the mask, and grow laterally over the dielectric mask until a fully coalesced continuous film is achieved.
Mocvd Growth Technique For Planar Semipolar (Al, In, Ga, B)N Based Light Emitting Diodes
Hitoshi Sato - Kanagawa, JP Roy B. Chung - Goleta CA, US Feng Wu - Goleta CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US
Assignee:
The Regents of the University of California - Oakland CA
A III-nitride optoelectronic device comprising a light emitting diode (LED) or laser diode with a peak emission wavelength longer than 500 nm. The III-nitride device has a dislocation density, originating from interfaces between an indium containing well layer and barrier layers, less than 9×10cm. The III-nitride device is grown with an interruption time, between growth of the well layer and barrier layers, of more than 1 minute.
Semipolar Nitride-Based Devices On Partially Or Fully Relaxed Alloys With Misfit Dislocations At The Heterointerface
Hiroaki Ohta - Goleta CA, US Feng Wu - Goleta CA, US Anurag Tyagi - Goleta CA, US Arpan Chakraborty - Goleta CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US Erin C. Young - Santa Barbara CA, US
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA - Oakland CA
A dislocation-free high quality template with relaxed lattice constant, fabricated by spatially restricting misfit dislocation(s) around heterointerfaces. This can be used as a template layer for high In composition devices. Specifically, the present invention prepares high quality InGaN templates (In composition is around 5-10%), and can grow much higher In-composition InGaN quantum wells (QWs) (or multi quantum wells (MQWs)) on these templates than would otherwise be possible.
Crystal Growth Of M-Plane And Semipolar Planes Of (Al, In, Ga, B)N On Various Substrates
Kwang C. Kim - Seoul, KR Mathew C. Schmidt - Santa Barbara CA, US Feng Wu - Goleta CA, US Asako Hirai - Santa Barbara CA, US Melvin B. McLaurin - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US James S. Speck - Goleta CA, US
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
H01L 29/20 C30B 25/02 C30B 23/06
US Classification:
257 76, 117 84, 257E29089
Abstract:
A method of reducing threading dislocation densities in non-polar such as a-{11-20} plane and m-{1-100} plane or semi-polar such as {10-1n} plane III-Nitrides by employing lateral epitaxial overgrowth from sidewalls of etched template material through a patterned mask. The method includes depositing a patterned mask on a template material such as a non-polar or semi polar GaN template, etching the template material down to various depths through openings in the mask, and growing non-polar or semi-polar III-Nitride by coalescing laterally from the tops of the sidewalls before the vertically growing material from the trench bottoms reaches the tops of the sidewalls. The coalesced features grow through the openings of the mask, and grow laterally over the dielectric mask until a fully coalesced continuous film is achieved.
Anisotropic Strain Control In Semipolar Nitride Quantum Wells By Partially Or Fully Relaxed Aluminum Indium Gallium Nitride Layers With Misfit Dislocations
Feng Wu - Goleta CA, US Anurag Tyagi - Goleta CA, US Arpan Chakraborty - Goleta CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US Erin C. Young - Santa Barbara CA, US
International Classification:
H01L 33/12 H01S 5/34 H01S 5/32
US Classification:
372 4501, 257 13, 438 47
Abstract:
An epitaxial structure for a III-Nitride based optical device, comprising an active layer with anisotropic strain on an underlying layer, where a lattice constant and strain in the underlying layer are partially or fully relaxed in at least one direction due to a presence of misfit dislocations, so that the anisotropic strain in the active layer is modulated by the underlying layer.
Anisotropic Strain Control In Semipolar Nitride Quantum Wells By Partially Or Fully Relaxed Aluminum Indium Gallium Nitride Layers With Misfit Dislocations
- Oakland CA, US Feng Wu - Goleta CA, US Anurag Tyagi - San Jose CA, US Arpan Chakraborty - Goleta CA, US James S. Speck - Goleta CA, US Steven P. DenBaars - Goleta CA, US Shuji Nakamura - Santa Barbara CA, US Erin C. Young - Santa Barbara CA, US
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA - Oakland CA
International Classification:
H01S 5/343 H01S 5/34
US Classification:
372 45012, 438 47
Abstract:
An epitaxial structure for a III-Nitride based optical device, comprising an active layer with anisotropic strain on an underlying layer, where a lattice constant and strain in the underlying layer are partially or fully relaxed in at least one direction due to a presence of misfit dislocations, so that the anisotropic strain in the active layer is modulated by the underlying layer.