Francisco Javier Juarez

US Patent:

20220228263, Jul 21, 2022

Filed:

May 22, 2020

Appl. No.:

17/595966

Inventors:

- Fremont CA, US
Brian Joseph Williams - Tigard OR, US
Francisco J. Juarez - West Linn OR, US
Rachel E. Batzer - Tualatin OR, US
Ramesh Chandrasekharan - Portland OR, US
Richard Phillips - Newberg OR, US
Nuoya Yang - Portland OR, US
Joseph L. Womack - Tigard OR, US
Ming Li - West Linn OR, US
Jun Qian - Sherwood OR, US
Tu Hong - Tualatin OR, US
Sky Mullenaux - Tigard OR, US

International Classification:

C23C 16/455
C23C 16/52
H01L 21/67

Abstract:

Methods and apparatuses are provided herein for independently adjusting flowpath conductance. One multi-station processing apparatus may include a processing chamber, a plurality of process stations in the processing chamber that each include a showerhead having a gas inlet, and a gas delivery system including a junction point and a plurality of flowpaths, in which each flowpath includes a flow element, includes a temperature control unit that is thermally connected with the flow element and that is controllable to change the temperature of that flow element, and fluidically connects one corresponding gas inlet of a process station to the junction point such that each process station of the plurality of process stations is fluidically connected to the junction point by a different flowpath.