Gary David O'Brien

US Patent:

6913941, Jul 5, 2005

Filed:

Sep 9, 2002

Appl. No.:

10/238062

Inventors:

Gary J. O'Brien - Gilbert AZ, US
David J. Monk - Mesa AZ, US

Assignee:

Freescale Semiconductor, Inc. - Schaumburg IL

International Classification:

H01L021/00

US Classification:

438 48, 438 50, 438 52

Abstract:

A method for creating a MEMS structure is provided. In accordance with the method, a substrate () is provided having a sacrificial layer () disposed thereon and having a layer of silicon () disposed over the sacrificial layer. A first trench () is created which extends through the silica layer and the sacrificial layer and which separates the sacrificial layer into a first region () enclosed by the first trench and a second region () exterior to the first trench. A first material () is deposited into the first trench such that the first material fills the first trench to a depth at least equal to the thickness of the sacrificial layer. A second trench () is created exterior to the first trench which extends through at least the silicon layer and exposes at least a portion of the second region of the sacrificial layer. The second region of the sacrificial layer is contacted, by way of the second trench, with a chemical etching solution adapted to etch the sacrificial layer, said etching solution being selective to the first material.

US Patent:

6307298, Oct 23, 2001

Filed:

Mar 20, 2000

Appl. No.:

9/531697

Inventors:

Gary J. O'Brien - Gilbert AZ

Assignee:

Motorola, Inc. - Schaumburg IL

International Classification:

H02N 100

US Classification:

310309

Abstract:

An actuator includes a support layer (110), a stationary structure (130) located over the support layer and including two portions (131, 132, 731, 732, 831, 832) adjacent to each other and separated from each other by a gap (133), and a movable structure (140, 240, 340, 440, 540, 650, 740, 840) coupled to and located over the support layer, located adjacent to the stationary structure, and movable relative to the stationary structure and the support layer. A portion (143, 243, 343, 443, 543, 643, 743, 843) of the movable structure is located in the gap between the two portions of the stationary structure, and the portion of the movable structure comprises a body (144) and an asymmetric structure (145, 245, 345, 445, 545, 645, 745, 845) extending from the body.