George Michael Bleyle

US Patent:

6402806, Jun 11, 2002

Filed:

Jun 30, 2000

Appl. No.:

09/608659

Inventors:

John Vincent Schmitt - Sunnyvale CA
Ling Chen - Sunnyvale CA
George Michael Bleyle - Fremont CA
Yu Cong - Sunnyvale CA
Alfred Mak - Union City CA
Mei Chang - Saratoga CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C22B 1500

US Classification:

75414, 75639, 4232453, 423240 R, 427253

Abstract:

A hot trap converts unreacted organic metal-film precursor from the exhaust stream of a CVD process. The converted precursor forms a metal film on the surface of the hot trap, thereby protecting hot vacuum pump surfaces from metal build up. A cold trap downstream from the hot trap freezes effluents from the exhaust stream. The metal captured by the hot trap and the effluents captured by the cold trap may then be recycled, rather than being released as environmental emissions.

US Patent:

60996498, Aug 8, 2000

Filed:

Dec 23, 1997

Appl. No.:

8/996735

Inventors:

John Vincent Schmitt - Sunnyvale CA
Ling Chen - Sunnyvale CA
George Michael Bleyle - Fremont CA
Yu Cong - Sunnyvale CA
Alfred Mak - Union City CA
Mei Chang - Saratoga CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118715

Abstract:

A hot trap converts unreacted organic metal-film precursor from the exhaust stream of a CVD process. The converted precursor forms a metal film on the surface of the hot trap, thereby protecting hot vacuum pump surfaces from metal build up. A cold trap downstream from the hot trap freezes effluents from the exhaust stream. The metal captured by the hot trap and the effluents captured by the cold trap may then be recycled, rather than being released as environmental emissions.