Greg Charles Felix

US Patent:

7212290, May 1, 2007

Filed:

Jul 28, 2004

Appl. No.:

10/900529

Inventors:

Kevin R. Fine - Menlo Park CA, US
Greg C. Felix - San Jose CA, US
John J. Bockman - Santa Clara CA, US
Douglas P. Woolverton - Mountain View CA, US

Assignee:

Agilent Technologies, Inc. - Santa Clara CA

International Classification:

G01B 9/02

US Classification:

356495, 356493

Abstract:

An interferometer system includes a rhomboid assembly having a first optical stack and a second optical stack mounted on the first stack. The first stack includes a first prism having an angled face mounted to an angled face of a second prism. The interface between these angled faces includes a first polarizing beam-splitter. The second stack includes a third prism having an angled face mounted to an angled face of the fourth prism. The interface between these angled faces includes a second polarizing beam-splitter. First, second, third, and fourth wave plate elements are located in beam paths between the rhomboid assembly and at least one of a measurement optic and a reference optic. A redirecting optic is located at least adjacent to the vertical faces of the first and the third prisms.

US Patent:

7280275, Oct 9, 2007

Filed:

Aug 1, 2005

Appl. No.:

11/195545

Inventors:

W. Clay Schluchter - Los Altos CA, US
Ron P. Bevis - Morgan Hill CA, US
John J. Bockman - Santa Clara CA, US
Greg C. Felix - San Jose CA, US
Terry E. Riener - Union City CA, US

Assignee:

Agilent Technologies, Inc. - Santa Clara CA

International Classification:

G02B 27/28

US Classification:

359496, 359497, 359834, 362339

Abstract:

A beam distribution apparatus includes a stack of parallelogram prisms and beam-splitting coatings each located between opposing parallel faces of adjacent parallelogram prisms. The stack is mounted on an entrance face of a triangular prism. The triangular prism includes the entrance face, a reflective face, and an exit face. The reflective face has optical surfaces for shaping output beams from the stack and reflecting the output beams through the exit face.

US Patent:

7652771, Jan 26, 2010

Filed:

Oct 31, 2007

Appl. No.:

11/931622

Inventors:

Greg C Felix - San Jose CA, US

Assignee:

Agilent Technologies, Inc. - Santa Clara CA

International Classification:

G01B 9/02

US Classification:

356493

Abstract:

An interferometer has a first reflective surface having a nominal orientation; a second reflective surface having a nominal orientation orthogonal to the nominal orientation of the first reflective surface; a retroreflector facing the first reflective surface; a double polarizing beam splitter (DPBS) between the first reflective surface and the retroreflector; and a respective quarter-wave plate between the DPBS and each of the reflective surfaces. The DPBS has first and second beam-splitting surfaces each having a nominal orientation with respect to the first reflective surface. At least part of at least one of the first reflective surface, the second reflective surface and the beam-splitting surfaces is effectively tilted relative to the respective nominal orientation of such surface, and constitutes a respective tilted surface.

US Patent:

20030197870, Oct 23, 2003

Filed:

Oct 30, 2002

Appl. No.:

10/285058

Inventors:

Kerry Bagwell - Campbell CA, US
Greg Felix - San Jose CA, US
John Bockman - Santa Clara CA, US

International Classification:

G01B009/02

US Classification:

356/493000

Abstract:

A multi-axis interferometer uses a combined beam for a first pass through the interferometer optics. Measurement and reference components of the combined beam that exit the interferometer optics are subject to walk-off that measurement or reference reflector misalignment can cause. A return reflector and non-polarizing beam splitter system split the combined beam into separated input beams for the various axes of the interferometer and return the separated beams for respective second passes through the interferometer optics. Walk-off for the separated beams in the interferometer optics cancels the walk-off for the combined beam to eliminate beam walk-off in separated output beams. Sharing a combined beam for a first pass through the interferometer optics reduces the sizes required for the interferometer optics and reference and measurement mirrors. The multi-axis interferometer may have a single return reflector.

US Patent:

20070035846, Feb 15, 2007

Filed:

Aug 11, 2005

Appl. No.:

11/203014

Inventors:

Scott Detro - Los Altos CA, US
Greg Felix - San Jose CA, US

International Classification:

G02B 27/14

US Classification:

359634000

Abstract:

A frame, termed a prism frame, is attached to a processing face of a prism assembly and used to hold a position of a compensating waveplate and a microdisplay. The compensating waveplate includes adjustment tabs that allow precise positioning of an orientation of the waveplate (e.g., waveplate angle, rotation, etc) such that it is best positioned to compensate for items like residual retardation and/or skew rays that occur in the kernel. The precise position is varied depending on kernel design and other factors. A microdisplay frame is attached to a microdisplay package. The microdisplay frame is then precisely attached to the prism frame. The microdisplay can be removed from the kernel by sacrificing the inexpensive microdisplay frame.

US Patent:

20070109552, May 17, 2007

Filed:

Nov 3, 2005

Appl. No.:

11/266542

Inventors:

Greg Felix - San Jose CA, US
John Bockman - Santa Clara CA, US

International Classification:

G01B 9/02

US Classification:

356491000

Abstract:

An optical interferometer includes a monolithic optical element.

US Patent:

20170219334, Aug 3, 2017

Filed:

Nov 30, 2016

Appl. No.:

15/365204

Inventors:

- Minneapolis MN, US
Greg C. Felix - San Jose CA, US

International Classification:

G01B 9/02

Abstract:

An interferometer has a first input configured to provide a first measurement beam at a first frequency, and a second measurement signal at the first frequency. The interferometer has a second input configured to provide a reference beam at a second frequency that is different than the first frequency; an optical element comprising a first portion comprising a polarization beam splitter; and a diffraction grating disposed over the optical element configured to diffract the first measurement beam and the second measurement beam