Gregory W Beach

US Patent:

7202988, Apr 10, 2007

Filed:

Mar 25, 2004

Appl. No.:

10/811435

Inventors:

Alexander P. Payne - Ben Lomond CA, US
Michael J. Dueweke - Santa Clara CA, US
Wilhelmus De Groot - Palo Alto CA, US
David T. Amm - Sunnyvale CA, US
Omar S. Leung - Palo Alto CA, US
James A. Hunter - Campbell CA, US
Brent D. Lunceford - Austin TX, US
Gregory Beach - Georgetown TX, US

Assignee:

Silicon Light Machines Corporation - San Jose CA

International Classification:

G02B 26/00
G02B 26/08
G02F 1/29

US Classification:

359291, 359290, 359224, 359298

Abstract:

In one embodiment disclosed, a light modulator can be configured to have a substantially flat optically active modulator element portion while deflected. The modulator can include a plurality of modulator elements arranged substantially in parallel, with each modulator element including an optically active portion and a support portion on either side of the optically active portion. Further, the optically active portion can have a narrower width than the support portion. In another embodiment disclosed, a movable membrane for light modulation includes a substantially circular optically active portion and a released membrane portion surrounding the circular optically active portion. The substantially circular optically active portion can also include a plurality of gaps configured to expose a lower surface. Further, the substantially circular optically active portion can be essentially flat while in a deflected state.