International Rectifier Corporation - El Segundo CA
International Classification:
H01L 2976
US Classification:
257341, 257342, 257343, 257344, 257355, 257365
Abstract:
A three mask process is described for a low voltage, low on-resistance power MOSFET. A serpentine gate divides a non-epi silicon die into laterally separated drain and source regions with a very large channel width per unit area.
International Rectifier Corporation - El Segundo CA
International Classification:
H01L 2976
US Classification:
257328, 257329, 257330
Abstract:
An insulation is formed on a substrate of a material having a first conductivity type. A gate material is formed on the insulation. A portion of the gate material is removed thereby creating forming mesa type gate structures from remaining positions of the gate material. The mesas are then insulated. A channel forming layer, of a material having a second conductivity type, is formed between the produced mesas. Finally, a source of a material having the first conductivity type is formed on the channel forming layer.
Single Mask Trench Fred With Enlarged Schottky Area
International Rectifier Corporation - El Segundo CA
International Classification:
H01L 21302
US Classification:
438694, 438700, 438723, 438724, 438743, 438744
Abstract:
A single mask process is described for making a trench type fast recovery process. The single mask defines slots in a photoresist for locally removing strips of nitride and oxide from atop silicon and for subsequently etching trenches in the silicon. A boron implant is carried out in the bottoms of the trenches to form local P/N junctions. The oxide beneath the nitride is then fully stripped in the active area and only partly stripped in the termination area in which the trenches are wider spaced than in the active area. Aluminum is then deposited atop the active area and in the trenches, but is blocked from contact with silicon in the active area by the remaining nitride layer.
A termination structure and reduced mask process for its manufacture for either a FRED device or any power semiconductor device comprises at least two concentric diffusion guard rings and two spaced silicon dioxide rings used in the definition of the two guard rings. A first metal ring overlies and contacts the outermost diffusion. A second metal ring which acts as a field plate contacts the second diffusion and overlaps the outermost oxide ring. A third metal ring, which acts as a field plate, is a continuous portion of the active area top contact and overlaps the second oxide ring. The termination is useful for high voltage (of the order of 1200 volt) devices. The rings are segments of a common aluminum or Palladium contact layer.
International Rectifier Corporation - El Segundo CA
International Classification:
H01L021/336
US Classification:
438268, 257328
Abstract:
An insulation is formed on a substrate of a material having a first conductivity type. A gate material is formed on the insulation. A portion of the gate material is removed thereby creating forming mesa type gate structures from remaining positions of the gate material. The mesas are then insulated. A channel forming layer, of a material having a second conductivity type, is formed between the produced mesas. Finally, a source of a material having the first conductivity type is formed on the channel forming layer.
High Density Fet With Self-Aligned Source Atop The Trench
International Rectifier Corporation - El Segundo CA
International Classification:
H01L 21/336
US Classification:
438268, 438270, 438272
Abstract:
A method for manufacturing a power semiconductor device which includes forming a semiconductor region such as a polysilicon layer or epitaxially grown silicon over a region implanted with source implants and applying heat in a thermal step to cause the source implants to diffuse into the semiconductor region.
Igor Bol - Sherman Oaks CA, US Xin Li - Torrance CA, US
Assignee:
International Rectifier Corporation - El Segundo CA
International Classification:
H01L 29/76
US Classification:
257328, 257330, 257331
Abstract:
A vertical conduction trench FET has a plurality of trenches containing conductive polysilicon gates. The mesas between the trenches have a source diffusion region connected to a common source electrode. The trenches are spaced so that the depletion regions induced by the trench gate will overlap to pinch off conduction through the mesa to turn off the device. The gate potential is pulsed. The polysilicon in the trenches may be separated into two insulated portions. The pulses may be applied simultaneously or sequentially to the polysilicon gates.
Double Sided Semiconduction Device With Edge Contact And Package Therefor
A semiconductor die has devices such as MOSgated devices, diodes and the like formed into the top and bottom surfaces of the die. One terminal of each of the devices terminal in the interior center of the die and a common contact is made to the interior center of the die at one edge of the die. Various packages for the die having a reduced foot print on a support substrate are disclosed.