Jinju Lee

US Patent:

20020031920, Mar 14, 2002

Filed:

May 7, 2001

Appl. No.:

09/850920

Inventors:

Joseph Lyding - Champaign IL, US
Karl Hess - Champaign IL, US
Jinju Lee - Urbana IL, US

International Classification:

H01L029/76
H01L021/336
H01L029/94
H01L031/062
H01L031/113
H01L031/119
H01L021/324
H01L021/42
H01L021/477

US Classification:

438/795000, 257/410000, 438/798000

Abstract:

Semiconductor device annealing process with deuterium at superatmospheric pressures to improve reduction of the effects of hot carrier stress during device operation, and devices produced thereby.

US Patent:

20030219950, Nov 27, 2003

Filed:

Jul 24, 2002

Appl. No.:

10/202187

Inventors:

Joseph Lyding - Champaign IL, US
Karl Hess - Champaign IL, US
Jinju Lee - Urbana IL, US

International Classification:

H01L021/336
H01L021/26
H01L021/324
H01L021/42
H01L021/477

US Classification:

438/301000, 438/308000, 438/795000

Abstract:

Semiconductor device annealing process with deuterium at superatmospheric pressures to improve reduction of the effects of hot carrier stress during device operation, and devices produced thereby.

US Patent:

20190219611, Jul 18, 2019

Filed:

Aug 9, 2017

Appl. No.:

16/327827

Inventors:

- West Chester PA, US
Gregory S. Girolami - Urbana IL, US
Scott P. Lockledge - West Chester PA, US
Jinju Lee - Champaign IL, US

International Classification:

G01Q 70/10
H01J 37/28
G01Q 60/00
G01Q 60/16
G01Q 70/16

Abstract:

Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

US Patent:

20180328960, Nov 15, 2018

Filed:

Jul 20, 2018

Appl. No.:

16/041731

Inventors:

- West Chester PA, US
Gregory S. Girolami - Urbana IL, US
Scott P. Lockledge - West Chester PA, US
Jinju Lee - Champaign IL, US

International Classification:

G01Q 70/10
H01J 37/28
G01Q 70/16
G01Q 60/00
G01Q 60/16

Abstract:

Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

US Patent:

20180045755, Feb 15, 2018

Filed:

Aug 12, 2016

Appl. No.:

15/235889

Inventors:

- West Chester PA, US
Gregory S. Girolami - Urbana IL, US
Scott P. Lockledge - West Chester PA, US
Jinju Lee - Champaign IL, US

International Classification:

G01Q 70/10
G01Q 60/00

Abstract:

Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.