Jairo Terra Moura

US Patent:

7834618, Nov 16, 2010

Filed:

Jun 27, 2008

Appl. No.:

12/163984

Inventors:

Jairo Moura - Marlboro MA, US
Martin Hosek - Lowell MA, US
Jay Krishnasamy - Billerica MA, US
Jeff Paranay - Dracut MA, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

G01B 7/14
G01B 7/30

US Classification:

32420726, 32420725, 32420724

Abstract:

A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.

US Patent:

7891936, Feb 22, 2011

Filed:

Mar 30, 2005

Appl. No.:

11/093479

Inventors:

Jairo Terra Moura - Marlboro MA, US
Martin Hosek - Lowell MA, US
Todd Bottomley - Chesterfield NH, US
Ulysses Gilchrist - Reading MA, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

H01L 21/68

US Classification:

414783, 414217, 414936, 414941

Abstract:

A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.

US Patent:

7904182, Mar 8, 2011

Filed:

Jul 11, 2005

Appl. No.:

11/178615

Inventors:

Martin Hosek - Lowell MA, US
Stuart Beale - Lowell MA, US
Roumen Botev - Groton MA, US
Matthew Coady - Hollis NH, US
Christopher Hofmeister - Hampstead NH, US
Mark Ives - Merrimack NH, US
Jairo Moura - Marlboro MA, US
Robert Caveney - Windham NH, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

G05B 15/00
G05B 19/418
G05B 19/18
G06F 19/00
G06K 9/00
B05C 11/00

US Classification:

700 1, 118687, 382153, 700245, 700248, 700250, 700261

Abstract:

A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

US Patent:

8283813, Oct 9, 2012

Filed:

Jun 27, 2008

Appl. No.:

12/163996

Inventors:

Ulysses Gilchrist - Reading MA, US
Martin Hosek - Lowell MA, US
Jairo Terra Moura - Marlboro MA, US
Jay Krishnasamy - Billerica MA, US
Christopher Hofmeister - Hampstead NH, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

H02K 7/09

US Classification:

310 1214, 310 1219, 310 67 R, 310 905, 310114, 310 1215, 4147445, 901 15, 901 23, 7449001, 7449003

Abstract:

A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

US Patent:

8403619, Mar 26, 2013

Filed:

Feb 18, 2011

Appl. No.:

13/030926

Inventors:

Jairo Terra Moura - Marlboro MA, US
Martin Hosek - Lowell MA, US
Todd Bottomley - Chesterfield NH, US
Ulysses Gilchrist - Reading MA, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

H01L 21/68

US Classification:

414783, 414217, 414936, 414941

Abstract:

In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.

US Patent:

8545165, Oct 1, 2013

Filed:

Jul 11, 2005

Appl. No.:

11/179745

Inventors:

Jairo T. Moura - Marlboro MA, US
Martin Hosek - Lowell MA, US
Todd Bottomley - Chesterfield NH, US
Ulysses Gilchrist - Reading MA, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

H01L 21/68

US Classification:

414783, 414217, 414936, 414941

Abstract:

A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.

US Patent:

20090001907, Jan 1, 2009

Filed:

Jun 27, 2007

Appl. No.:

11/769688

Inventors:

Martin Hosek - Lowell MA, US
Jairo Terra Moura - Marlboro MA, US
Christopher Hofmeister - Hampstead NH, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

H02P 31/00

US Classification:

318115

Abstract:

A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.

US Patent:

20090001917, Jan 1, 2009

Filed:

Jun 27, 2007

Appl. No.:

11/769651

Inventors:

Martin Hosek - Lowell MA, US
Jairo Terra Moura - Marlboro MA, US
Christopher Hofmeister - Hampstead NH, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

H02P 31/00

US Classification:

318491

Abstract:

A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.