James Anne Dietz

US Patent:

7819981, Oct 26, 2010

Filed:

Oct 26, 2004

Appl. No.:

10/973673

Inventors:

Frank DiMeo, Jr. - Danbury CT, US
James Dietz - Scarsdale NY, US
W. Karl Olander - Indian Shores FL, US
Robert Kaim - Brookline MA, US
Steven E. Bishop - Rio Rancho NM, US
Jeffrey W. Neuner - Bethel CT, US
Jose I. Arno - Brookfield CT, US

Assignee:

Advanced Technology Materials, Inc. - Danbury CT

International Classification:

B08B 6/00

US Classification:

134 12, 134 11

Abstract:

A method and apparatus for cleaning residue from components of an ion source region of an ion implanter used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive halide composition for sufficient time and under sufficient conditions to at least partially remove the residue. The gas-phase reactive halide composition is chosen to react selectively with the residue, while not reacting with the components of the ion source region or the vacuum chamber.

US Patent:

7955797, Jun 7, 2011

Filed:

Oct 25, 2004

Appl. No.:

10/972542

Inventors:

James V. McManus - Bethel CT, US
James A. Dietz - Scarsdale NY, US
Steven M. Lurcott - Sherman CT, US

Assignee:

Advanced Technology Materials, Inc. - Danbury CT

International Classification:

C12Q 1/68

US Classification:

435 6

Abstract:

A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.

US Patent:

7966879, Jun 28, 2011

Filed:

Oct 24, 2005

Appl. No.:

11/577864

Inventors:

James Dietz - Scarsdale NY, US
Steven E. Bishop - Rio Rancho NM, US
James V. McManus - Bethel CT, US
Steven M. Lurcott - Sherman CT, US
Michael J. Wodjenski - New Milford CT, US
Robert Kaim - Brookline MA, US
Frank Dimeo, Jr. - Falls Church VA, US

Assignee:

Advanced Technology Materials, Inc. - Danbury CT

International Classification:

G01F 23/00

US Classification:

73313

Abstract:

A monitoring system () for monitoring fluid in a fluid supply vessel () during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors () for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module () operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor () and display () operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

US Patent:

20110232367, Sep 29, 2011

Filed:

Jun 7, 2011

Appl. No.:

13/155237

Inventors:

James V. McManus - Bethel CT, US
James A. Dietz - Allison Park PA, US
Steven M. Lurcott - Sherman CT, US

Assignee:

ADVANCED TECHNOLOGY MATERIALS, INC. - Danbury CT

International Classification:

G01N 7/00

US Classification:

73 3104

Abstract:

A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.

US Patent:

63021390, Oct 16, 2001

Filed:

Jul 16, 1999

Appl. No.:

9/356020

Inventors:

James Dietz - Danbury CT

Assignee:

Advanced Technology Materials, Inc. - Danbury CT

International Classification:

B08B 9027
B08B 500
G05B 1101
G06F 1500

US Classification:

137240

Abstract:

An auto-switching sub-atmospheric pressure gas delivery system, for dispensing gas to a gas-consuming process unit, e. g. , a semiconductor manufacturing tool. The gas delivery system uses a multiplicity of gas panels, wherein one panel is in active gas dispensing mode and supplying gas from a sub-atmospheric pressure gas source coupled to the flow circuitry of the panel. During the active gas dispensing operation in such panel, a second gas panel of the system undergoes purge, evacuation and fill transition to active gas dispensing condition, to permit switching to the second panel upon exhaustion of the sub-atmospheric pressure gas source coupled to the first gas panel without the occurrence of pressure spikes or flow perturbations.

US Patent:

59806087, Nov 9, 1999

Filed:

Jan 7, 1998

Appl. No.:

9/003611

Inventors:

James Dietz - Danbury CT
James V. McManus - Danbury CT

Assignee:

Advanced Technology Materials, Inc. - Danbury CT

International Classification:

B01D 5304

US Classification:

95 12

Abstract:

An apparatus for storage and dispensing of a gas, comprising a gas storage and dispensing vessel holding a physical sorbent medium and gas adsorbed on the physical sorbent medium, wherein a carrier gas, e. g. , helium, hydrogen, argon, etc. , is flowed through the vessel to effect desorption of the sorbate gas and entrainment of the desorbed gas in the carrier gas stream. The storage and dispensing system of the invention may be employed to provide the dispensed sorbate gas to a downstream locus of use in applications such as epitaxial film formation and ion implantation, in the manufacture of semiconductor devices.