James J Fair

US Patent:

57413630, Apr 21, 1998

Filed:

Mar 22, 1996

Appl. No.:

8/621088

Inventors:

Peter C. Van Buskirk - Newtown CT
James A. Fair - Mountain View CA
David E. Kotecki - Hopewell Jct. NY

Assignee:

Advanced Technology Materials, Inc. - Danbury CT
International Business Machines Corporation - Armonk NY
Varian Corporation - Palo Alto CA

International Classification:

C23C 1600

US Classification:

118715

Abstract:

A showerhead disperser device for mixing plural vapor streams, comprising: a housing including front and rear walls in spaced apart relation to one another, and a side wall therebetween, defining within the housing an interior volume; the front wall having a multiplicity of vapor mixture discharge openings therein, for discharging mixed vapor from the interior volume of the housing exteriorly thereof, flow passages joined to the housing for introducing into the interior volume of the housing respective fluids to be mixed therein; and at least one baffle plate mounted in the interior volume of the housing, intermediate the front and rear walls of the housing, the baffle plate having an edge in spaced relation to the side wall to form an annular flow passage therebetween and the baffle plate having at least one of the respective fluids directed thereagainst upon introduction to the interior volume of the housing, for distribution thereof in the interior volume of the housing. The baffled showerhead disperser is usefully employed to enable formation of CVD thin films of highly uniform composition and thickness.

US Patent:

60107480, Jan 4, 2000

Filed:

Feb 3, 1998

Appl. No.:

9/017384

Inventors:

Peter C. Van Buskirk - Newtown CT
James A. Fair - Mountain View CA
David E. Kotecki - Hopewell Jct. NY

Assignee:

Advanced Technology Materials, Inc. - Danbury CT
International Business Machines Corporation - Armonk NY
Varian Corporation - Palo Alto CA

International Classification:

C23C 1640

US Classification:

4272481

Abstract:

A showerhead disperser device for mixing plural vapor streams, comprising: a housing including front and rear walls in spaced apart relation to one another, and a side wall therebetween, defining within the housing an interior volume; the front wall having a multiplicity of vapor mixture discharge openings therein, for discharging mixed vapor from the interior volume of the housing exteriorly thereof, flow passages joined to the housing for introducing into the interior volume of the housing respective fluids to be mixed therein; and at least one baffle plate mounted in the interior volume of the housing, intermediate the front and rear walls of the housing, the baffle plate having an edge in spaced relation to the side wall to form an annular flow passage therebetween and the baffle plate having at least one of the respective fluids directed thereagainst upon introduction to the interior volume of the housing, for distribution thereof in the interior volume of the housing. The baffled showerhead disperser is usefully employed to enable formation of CVD thin films of highly uniform composition and thickness.