James M Wynn

US Patent:

62200607, Apr 24, 2001

Filed:

Apr 8, 1999

Appl. No.:

9/288432

Inventors:

Patrick William Wisk - Greenbrook NJ
James Dennis Wynn - Plainfield NJ
Man Fei Yan - Berkeley Heights NJ

Assignee:

Lucent Technologies Inc. - Murray Hill NJ

International Classification:

C03B 3702

US Classification:

65435

Abstract:

The specification describes a process and apparatus for collapsing preform tubes in Modified Chemical Vapor Deposition processes. The problem of bubble formation during tube collapse was found to be attributable to excess dopant vapor pressure emitted from the hot zone during the final stage of tube collapse. This excess pressure is controlled by cooling the tube in advance of the torch, thereby decreasing the viscosity of the dopant vapor and increasing its transport rate. This is found to reduce internal tube pressure and eliminate bubble formation in the collapsed preform.

US Patent:

53288548, Jul 12, 1994

Filed:

Mar 31, 1993

Appl. No.:

8/040797

Inventors:

Daryoosh Vakhshoori - Scotch Plains NJ
James D. Wynn - Plainfield NJ
George J. Zydzik - Columbia NJ

Assignee:

AT&T Bell Laboratories - Murray Hill NJ

International Classification:

H01L 21265

US Classification:

437 24

Abstract:

A process is described of producing devices, such as vertical cavity surface emitting lasers or resonant cavity light emitting devices, with an insulating region between an active region and top electrode, the insulating region having a centrally located window permitting passage of the electric current from the top electrode to the bottom electrode centrally of the active region. The insulating region is formed by ion implantation. The window is defined by a photoresist mask formed by angle etching a photoresist masking layer by RIE, so as to form the mask with parallel side walls inclined at an angle to the normal to the masked surface. The ion implantation is conducted at the same angle and parallel to the side walls of the of the mask. This permits fabrication of devices individually or in arrays. An exemplary independently addressable top emitting 8. times.