Jan C Terry

US Patent:

43852386, May 24, 1983

Filed:

Mar 3, 1981

Appl. No.:

6/240084

Inventors:

Eugene R. Westerberg - Palo Alto CA
Donald R. Cone - Palo Alto CA
Julius J. Muray - Los Altos CA
Jan C. Terry - Palo Alto CA

Assignee:

Veeco Instruments Incorporated - Melville NY

International Classification:

H01J 3700

US Classification:

2504911

Abstract:

A reregistration system for determining and positioning the location of a substrate target surface with respect to a plurality of charged particle beams used to directly write an integrated circuit pattern simultaneously at a plurality of locations on the substrate is disclosed. Reregistration is accomplished by scanning two or more of the charged particle beams over a corresponding number of reregistration fiducial marks on the substrate. The reregistration marks may consist of a material having a high atomic number or predefined topographical features. Electrons scattered from these marks are detected and converted to electrical signals. The temporal relationship between the scanning beams and the resultant electrical signals may then be used to determine substrate location.