Jason E Feldman

US Patent:

6452177, Sep 17, 2002

Filed:

Sep 3, 1999

Appl. No.:

09/390547

Inventors:

Jason E. Feldman - Pasadena CA
Thomas George - La Crescenta CA
Jaroslava Z. Wilcox - Los Angeles CA

Assignee:

California Institute of Technology - Pasadena CA

International Classification:

H01J 37256

US Classification:

250310, 250307, 25044111

Abstract:

The present invention comprises an apparatus for performing in-situ elemental analyses of surfaces. The invention comprises an atmospheric electron x-ray spectrometer with an electron column which generates, accelerates, and focuses electrons in a column which is isolated from ambient pressure by a:thin, electron transparent membrane. After passing through the membrane, the electrons impinge on the sample in atmosphere to generate characteristic x-rays. An x-ray detector, shaping amplifier, and multi-channel analyzer are used for x-ray detection and signal analysis. By comparing the resultant data to known x-ray spectral signatures, the elemental composition of the surface can be determined.