Jeffrey Boyd Dailey

US Patent:

20110227203, Sep 22, 2011

Filed:

May 27, 2011

Appl. No.:

13/118234

Inventors:

Michael Marrs - Phoenix AZ, US
Jeffrey Dailey - Queen Creek AZ, US

Assignee:

Arizona Board of Regents, for and on behalf of Arizona State University - Scottsdale AZ

International Classification:

H01L 29/06
H01L 21/28
H01L 21/31

US Classification:

257637, 438685, 438763, 257E21158, 257E2124, 257E2902

Abstract:

In some embodiments, a method of providing a semiconductor device can include: (a) providing a substrate; (b) depositing a first metal layer over the substrate; (c) spin-coating a first dielectric material over the first metal layer, where the first dielectric material includes an organic siloxane-based dielectric material; and (d) depositing a second dielectric material comprising silicon nitride over the first dielectric material. Other embodiments are disclosed in this application.