Charles Walter Pearce - Emmaus PA Daniel Joseph McKee - Allentown PA Jeffrey Kenneth Haas - Orefield PA
Assignee:
Agere Systems Guardian Corp. - Orlando FL
International Classification:
H01L 2131
US Classification:
438763, 438981, 438264
Abstract:
A method is disclosed for the oxidation of a substrate and the formation of oxide regions in the substrate by implantation of fluorine into the silicon lattice and subsequently forming an oxide region by a typical oxide growth process. The oxide growth process may be those such as thermal oxidation or the local oxidation of silicon. The process according to the present invention allows for the simultaneous growth of oxides having different thicknesses at the same time by tailoring the fluorine implantation.
Wrongful Termination Personal Injury Medical Malpractice Slip and Fall Automobile Accidents and Injuries Wrongful Death Employment Law Discrimination Civil Rights
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Date: Jun 20, 2016
Source: Google
The Nightly Turbo: A-Rod's Poker Woes, PocketFives Says No, and More
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