A vacuum assembly used for warming processed substrates above the dew point to prevent unwanted moisture on the processed substrate surfaces as well as reducing negative impact on manufacturing throughput. The vacuum assembly includes a processing chamber, a substrate handling robot, and a heater which may be an optical heater. The processing chamber is configured to cryogenically process one or more substrates. The transfer chamber is connected to the processing chamber and houses the substrate handling robot. The substrate handling robot is configured to displace one or more substrates from the processing chamber to the transfer chamber. The heater is connected to the transfer chamber above the substrate handling robot such that the heater emits energy incident on the substrate when the substrate handling robot displaces the substrate in the transfer chamber.
John Robert Fairhurst - Plaistow NH, US Jeffrey E. Krampert - Topsfield MA, US Richard J. Hertel - Boxford MA, US
Assignee:
Varian Semiconductor Equipment Associates, Inc. - Gloucester MA
International Classification:
B66C 1/00 B66C 1/54
US Classification:
294 93
Abstract:
A device is disclosed for manipulating a substrate having an inside diameter (ID). The device includes a handle, a trigger that slides within the handle, an alignment shaft and a plurality of substrate supports having distal ends. A plurality of substrate support actuators are connected to the trigger. The trigger can move the plurality of substrate supports between a substrate engaging position and a substrate releasing position through selective engagement of the plurality of substrate supports by the plurality of substrate support actuators. In the substrate engaging position the distal ends of the substrate supports move radially outward to engage the ID of the substrate, enabling the device to hold the substrate without touching the substrate faces. Other embodiments are described and claimed.
Method And Apparatus For Lifting A Horizontally-Oriented Substrate From A Cassette
John Robert Fairhurst - Plaistow NH, US Jeffrey E. Krampert - Topsfield MA, US Richard J. Hertel - Boxford MA, US Richard Muka - Topsfield MA, US
Assignee:
Varian Semiconductor Equipment Associates, Inc. - Gloucester MA
International Classification:
B66F 19/00
US Classification:
294213, 414936
Abstract:
A system and method are disclosed for removing horizontally oriented substrates from a cassette. A substrate lifter has an engagement end for engaging a substrate and an adjustment end for engaging an adjustment assembly. The engagement end includes a recess having first and second arcuate sidewalls configured to engage an OD of the substrate, and a circular protrusion positioned between the first and second arcuate sidewalls. The circular protrusion allows lateral movement of the substrate up to a predetermined amount and prevents lateral movement of the substrate in excess of the predetermined amount. Other embodiments are described and claimed.
Optical Heater For Cryogenic Ion Implanter Surface Regeneration
Roger B. Fish - Bedford MA, US Jeffrey E. Krampert - Topsfield MA, US
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. - Gloucester MA
International Classification:
H01J 37/08 B01D 8/00
US Classification:
25049221, 62 555
Abstract:
In an ion implanter, one or more optical heaters are disposed above a pair of support arms. The support arms have an engaged positioned which is disposed beneath a platen and a retractable position displaced vertically away from the platen and rotated away from the platen in a direction parallel to a planar surface thereof. When the support arms are in the retracted position, the one or more optical heaters is configured to provide optical energy incident on surfaces of the cooling pads disposed on the support arms for removal of unwanted materials thereon. In this manner, the optical heaters are used during a regeneration cycle of cryogenic surfaces in an ion implanter.
Mechanism And Method For Ensuring Alignment Of A Workpiece To A Mask
Varian Semiconductor Equipment Associates, Inc. - Gloucester MA
International Classification:
B23Q 7/00 B23Q 3/00
US Classification:
29559, 269 19
Abstract:
A workpiece support having alignment features to allow the proper alignment of the shadow mask to the workpiece is provided. The alignment features include tactile sensors, so as to measure the pressure being applied to each alignment feature. Based on these pressure readings, a determination can be made as to whether the workpiece is properly aligned with the shadow mask. In some embodiments, corrective actions may be initiated if a determination is made that the workpiece is not properly aligned.
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. - Gloucester MA
International Classification:
H01J 37/08 F16J 15/02
US Classification:
25049221, 277628
Abstract:
In an ion implanter, an elastomer seal is used for cryogenic processing and includes an internal cavity defined by a pair of opposing side walls and a bottom wall disposed therebetween. An electrically conductive spring is disposed within the cavity and extends along a length of the seal. The seal is configured to provide a lateral biasing force against the pair of opposing side walls and to conduct an applied current which results in heat being generated that emanates at least along the pair of opposing side walls. In this manner, the heat from the spring maintains the temperature of the seal above its brittle point. This allows the elastomer seal to maintain its pliability and consequently its sealing integrity during processing at cryogenic temperatures.
Method And Apparatus For Removing A Vertically-Oriented Substrate From A Cassette
John Robert Fairhurst - Plaistow NH, US Jeffrey E. Krampert - Topsfield MA, US Richard J. Hertel - Boxford MA, US
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. - Gloucester MA
International Classification:
B65G 49/00
US Classification:
41422201, 414806
Abstract:
A system and method are disclosed for removing vertically oriented substrates from a cassette. A lifter includes a lifter notch and a stabilizer notch for holding a substrate. The lifter notch engages and lifts the substrate along the substrate ID, while the stabilizer notch captures the substrate OD to prevent lateral movement of the substrate during lifting. In use, the cassette is tilted to bias all substrates to one side and ensure consistent spacing. The lifter moves up into the cassette until the notches are adjacent, but beneath, the ID and OD of a substrate. The lifter is moved laterally to position the notches directly below the ID and OD. Upward movement of the lifter causes the lifter notch to lift the substrate along the ID. The lifter continues upward with the substrate until the substrate clears the top of the cassette. Other embodiments are described and claimed.
Method And Apparatus For Holding A Plurality Of Substrates For Processing
John Robert Fairhurst - Plaistow NH, US Jeffrey E. Krampert - Topsfield MA, US Richard J. Hertel - Boxford MA, US Edward MacIntosh - Amesbury MA, US
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. - Gloucester MA
International Classification:
B65G 65/00 B65D 51/04
US Classification:
414800, 220810
Abstract:
A substrate carrier includes a carrier plate, a cover plate and a plurality of substrate support slots. The carrier plate has recesses for receiving substrates. A sidewall of each recess includes protrusions for engaging the OD of a substrate. The cover plate is rotatable-and has a cam on an undersurface. The cam is enagageable with a lateral slot in each of a plurality of substrate supports of the carrier plate. Rotating the cover plate causes the cam to move the substrate supports, one by one, so a substrate engaging end of the substrate support moves away from an associated substrate recess. A substrate is loaded into the recess, whereupon the cover plate is rotated further so the cam disengages from the lateral slot. The substrate supports are biased to engage the OD of the substrate to lock the substrate within the recess. Other embodiments are described and claimed.