Jian Z Lu

US Patent:

20200233320, Jul 23, 2020

Filed:

Sep 28, 2018

Appl. No.:

16/650359

Inventors:

- Wilmington MA, US
Keith Frank BEST - Tewksbury MA, US
Wayne FITZGERALD - Le Cheylas, FR
Jian LU - Chelmsford MA, US
Xin SONG - Andover MA, US
J. Casey DONAHER - Westford MA, US
Christopher J. MCLAUGHLIN - Minneapolis MN, US

Assignee:

Onto Innovation, Inc. - Wilmington MA

International Classification:

G03F 9/00
G03F 7/20

Abstract:

A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.

US Patent:

20190086486, Mar 21, 2019

Filed:

Mar 9, 2018

Appl. No.:

15/917198

Inventors:

- Cambridge MA, US
Jian Lu - Medford MA, US
Yaqing Zhang - Cambridge MA, US
Benjamin K. Ofori-Okai - Cambridge MA, US
Keith A. Nelson - Newton MA, US
Xian Li - Cambridge MA, US

International Classification:

G01R 33/26
G01R 33/60
G01N 24/10
G01R 33/32

Abstract:

A nonlinear terahertz (THz) spectroscopy technique uses a sample illuminated by two THz pulses separately. The illumination generates two signals Band B, corresponding to the first and second THz pulse, respectively, after interaction with the sample. The interaction includes excitation of at least one ESR transition in the sample. The sample is also illuminated by the two THz pulses together, with an inter-pulse delay τ, generating a third signal B. A nonlinear signal BNL is then derived via B=B−B−B. This nonlinear signal Bcan be then processed (e.g., Fourier transform) to study the properties of the sample.

US Patent:

20170336482, Nov 23, 2017

Filed:

May 19, 2017

Appl. No.:

15/600029

Inventors:

Harold Young HWANG - Cambridge MA, US
Jian Lu - Medford MA, US
Yaqing Zhang - Cambridge MA, US
Benjamin K. Ofori-Okai - Cambridge MA, US
Keith A. Nelson - Newton MA, US
Xian Li - Cambridge MA, US

International Classification:

G01R 33/26
G01R 33/60

Abstract:

A nonlinear terahertz (THz) spectroscopy technique uses a sample illuminated by two THz pulses separately. The illumination generates two signals Band B, corresponding to the first and second THz pulse, respectively, after interaction with the sample. The interaction includes excitation of at least one ESR transition in the sample. The sample is also illuminated by the two THz pulses together, with an inter-pulse delay τ, generating a third signal B. A nonlinear signal BNL is then derived via B=B−B−B. This nonlinear signal Bcan be then processed (e.g., Fourier transform) to study the properties of the sample.