A method of separating a thin die ( ) from a support body ( ) of a semiconductor wafer ( ). The thin die ( ) being initially attached to the support body ( ) by an attachment mechanism ( ). The attachment mechanism may be a plurality of tethers ( ) that extend between the thin die ( ) and the support body ( ). The method may include the steps of: positioning the wafer ( ) on a rigid backing ( ) having a hole ( ), the hole ( ) positioned beneath the thin die ( ); positioning a tip ( ) of a handler ( ) above the thin die ( ), the tip ( ) having a passageway ( ) to a vacuum source; positioning an ejection pin ( ) in a spaced apart relationship beneath the thin die ( ); moving the tip ( ) of the handler ( ) downward toward the thin die ( ) to break the attachment mechanism ( ) and clamp the thin die ( ) between the tip ( ) of the handler ( ) and the ejection pin ( ); and moving the ejection pin ( ) upward in the direction of the tip ( ) of the handler ( ) until the thin die ( ) is extracted from the wafer ( ).
Microdevice Assembly Having A Fine Grain Getter Layer For Maintaining Vacuum
Joe P. Wang - Long Grove IL, US Cheryl B. Field - Kildeer IL, US Michael Pfeifer - Northbrook IL, US
Assignee:
Motorola, Inc. - Schaumburg IL
International Classification:
H01J019/70 H01J009/38
US Classification:
313553, 313481, 313549, 313561
Abstract:
A microdevice assembly () that includes a device microstructure (), a housing (), and a fine grain getter layer (). The housing () has a base portion () and a lid (). The device microstructure () is attached to the base portion () and the lid () is hermetically sealed to the base portion (). The housing () defines a cavity () surrounding the device microstructure (). The fine grain getter layer () is on an interior side () of the lid () for maintaining a vacuum in the cavity () surrounding the device microstructure (). The lid () may be made of metal or have at least a metallic surface in the region where the fine grain getter layer () is applied. The fine grain getter layer () has a sub-micron grain size. There is also a method for making the microdevice assembly ().
Shiuh-Hui Steven Chen - Lake Zurich IL Yanling Kang - Northbrook IL Joe P. Wang - Long Grove IL
Assignee:
Motorola, Inc. - Schaumburg IL
International Classification:
G01L 904
US Classification:
73726
Abstract:
A reliable sensor provides a user-friendly semiconductor sensing device and transducer which accurately detects the characteristics of a fluid, such as pressure and strain, at high temperature operating conditions. The high performance sensor is particularly useful for use with diesel engines and internal combustion engines in vehicles. The sensor can comprise a single die with a transverse strain gauge or a group of strain gauges which are located at a position on the die to help minimize electric effects of thermal stress on the gauges during pressure detection and operation of the vehicle. The die can be glass fused, such as by glass frit, to a diaphragm, such as a stainless steel diaphragm, so as not to readily corrode in the fluid.
Pressure Sensor With External Vertical Electrical Interconnection System
- Auburn Hills MI, US Joe Pin Wang - Deer Park IL, US David W. Ivaska - Deer Park IL, US Richard E. Cronin - Deer Park IL, US Erich Mattmann - Schwalbach, DE Frank Langner - Schwalbach, DE
A pressure sensor assembly, which includes a support substrate, circuitry mounted to the support substrate, at least one conductor mounted to the support substrate and in electrical communication with the circuitry, and at least one vertically conductive path connected to and in electrical communication with the at least one conductor. The pressure sensor assembly also includes a diaphragm, at least one sealing glass section connected to the diaphragm and the support substrate, and at least one lateral conductive feed-through mounted to the diaphragm. At least one conductive joint is connected to the vertically conductive path and the lateral conductive feed-through, and the conductive joint provides electrical communication between the vertically conductive path and the lateral conductive feed-through.
- Auburn Hills MI, US Joe Pin Wang - Long Grove IL, US
International Classification:
B81C 3/00
US Classification:
257415, 438 51
Abstract:
A micro-electromechanical pressure transducer formed from a silicon die centers itself on a pedestal, formed from either a metal or a dielectric, by applying a predetermined amount of liquid epoxy adhesive to the square, top surface of the pedestal and allowing the liquid adhesive to distribute itself over the top surface. A MEMS die placed atop the liquid adhesive is centered on the top surface by surface tension between sides of the die and the top surface.
Micro-Electromechanical Pressure Sensor Having Reduced Thermally-Induced Stress
- Auburn Hills MI, US Joe Pin Wang - Long Grove IL, US
Assignee:
CONTINENTAL AUTOMOTIVE SYSTEMS, INC. - Auburn Hills MI
International Classification:
B81B 3/00 B81C 3/00
US Classification:
257419, 438 51, 257E29324, 257E21499
Abstract:
Thermally-induced stress on a silicon micro-electromechanical pressure transducer (MEMS sensor) is reduced by attaching the MEMS sensor to a plastic filled with low Cfillers that lowers the plastic's coefficient of thermal expansion (C) to be closer to that of silicon. The MEMS sensor is attached to the housing using an epoxy adhesive/silica filler mixture, which when cured has a Cbetween about ten PPM/ C. and about thirty PPM/ C. in order to match the housing C. The adhesive also has a glass transition temperature (Tg) above the operating temperature range. This design provides good sealing of the sensor and stable sensor outputs.
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Joe Wang
Work:
QiaoXin Furnitures Ind. - G.M
Education:
Chinese Culture University - Physic
Joe Wang
Education:
University of Michigan - Ross School of Business
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