John T Busbee

Address:

2926 Timber Vw Dr, San Antonio, TX 78251

VIN:

3N1BC11E77L445741

Make:

NISSAN

Model:

VERSA

Year:

2007

US Patent:

60385251, Mar 14, 2000

Filed:

Apr 30, 1997

Appl. No.:

8/846437

Inventors:

John Francis Maguire - Helotes TX
John David Busbee - Beavercreek OH
David Charles Liptak - Dayton OH
David Peter Lubbers - Cincinnati OH
Steven R. LeClair - Spring Valley OH
Rand Robert Biggers - Dundee IL

Assignee:

Southwest Research Institute - San Antonio TX

International Classification:

G01B 1106

US Classification:

702172

Abstract:

A method of controlling a pulsed laser deposition process. A spectroscope is used to acquire Raman response data from a substrate as it is being coated with a film. A processor compares the response data to reference data, which may represent an uncoated substrate or an ideal film. In the former case, the attenuation of the response signal is used to indicate film thickness. In the former case, the peak characteristics of the film can be used to indicate its chemical properties. The processor may be further programmed to compare deposition rates, reaction rates, and transport rates to model data. The processor makes decisions regarding equipment control based on these comparisons. It may access heuristic rules to aid in decision making where several factors are involved.