John K Dunlop

US Patent:

7346093, Mar 18, 2008

Filed:

Mar 23, 2004

Appl. No.:

10/808157

Inventors:

Richard L. Sandstrom - Encinitas CA, US
John Martin Algots - San Diego CA, US
Joshua C. Brown - Escondido CA, US
Raymond F. Cybulski - San Diego CA, US
John Dunlop - San Diego CA, US
James K. Howey - Vista CA, US
Richard G. Morton - San Diego CA, US
Xiaojiang Pan - San Diego CA, US
William N. Partlo - Poway CA, US
Firas F. Putris - La Mesa CA, US
Tom A. Watson - Carlsbad CA, US
Thomas A. Yager - Encinitas CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S 3/08
H01S 3/22

US Classification:

372107, 372 55

Abstract:

A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount fromed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may pre-stress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.

US Patent:

20020103754, Aug 1, 2002

Filed:

Jun 15, 2001

Appl. No.:

09/881032

Inventors:

John Dunlop - San Diego CA, US

International Classification:

G06F017/60

US Classification:

705/039000

Abstract:

The InterNetLC Documentary Letter of net Trade Transaction and Settlement System is an alternative for commercial Letter of Credit transactions. It is a trade finance instrument issued by a bank or corporation via Internet for the purchase and shipment of goods to a buyer. The InterNetLC conforms to and is negotiable by the ICC Uniform Customs and Practices for Documentary Credits. The InterNetLC is a secure payment method for transactions that require settlement upon shipment, and is negotiable with authenticated e-documents representing the transport Bill of Lading or Air Waybill, Rail Waybill, Straight Bill, Courier Receipt, Invoice, Packing List and Bill of Exchange that are equivalent with the document requirements specified in the issued InterNetLC Letter of Credit.

US Patent:

20040160155, Aug 19, 2004

Filed:

Dec 18, 2003

Appl. No.:

10/742233

Inventors:

William Partlo - Poway CA, US
Gerry Blumenstock - San Diego CA, US
Norbert Bowering - San Diego CA, US
Kent Bruzzone - Cardiff by the Sea CA, US
Dennis Cobb - Lake Arrowhead CA, US
Timothy Dyer - Oceanside CA, US
John Dunlop - San Diego CA, US
Igor Fomenkov - San Diego CA, US
James Hysham - Oceanside CA, US
I. Oliver - San Diego CA, US
Frederick Palenschat - Lemon Grove CA, US
Xiaojiang Pan - San Diego CA, US
Curtis Rettig - Vista CA, US
Rodney Simmons - San Diego CA, US
John Walker - Escondido CA, US
R. Webb - Escondido CA, US
Thomas Hofmann - San Diego CA, US

International Classification:

H01J017/26
H01J061/28

US Classification:

313/231310

Abstract:

An DPP EUV source is disclosed which may comprise a debris mitigation apparatus employing a metal halogen gas producing a metal halide from debris exiting the plasma. The EUV source may have a debris shield that may comprise a plurality of curvilinear shield members having inner and outer surfaces connected by light passages aligned to a focal point, which shield members may be alternated with open spaces between them and may have surfaces that form a circle in one axis of rotation and an ellipse in another. The electrodes may be supplied with a discharge pulse shaped to produce a modest current during the axial run out phase of the discharge and a peak occurring during the radial compression phase of the discharge. The light source may comprise a turbomolecular pump having an inlet connected to the generation chamber and operable to preferentially pump more of the source gas than the buffer gas from the chamber. The source may comprise a tuned electrically conductive electrode comprising: a differentially doped ceramic material doped in a first region to at least select electrical conductivity and in a second region at least to select thermal conductivity. The first region may be at or near the outer surface of the electrode structure and the ceramic material may be SiC or alumina and the dopant is BN or a metal oxide, including SiO or TiO. The source may comprise a moveable electrode assembly mount operative to move the electrode assembly mount from a replacement position to an operating position, with the moveable mount on a bellows. The source may have a temperature control mechanism operatively connected to the collector and operative to regulate the temperature of the respective shell members to maintain a temperature related geometry optimizing the glancing angle of incidence reflections from the respective shell members, or a mechanical positioner to position the shell members. The shells may be biased with a voltage. The debris shield may be fabricated using off focus laser radiation. The anode may be cooled with a hollow interior defining two coolant passages or porous metal defining the passages. The debris shield may be formed of pluralities of large, intermediate and small fins attached either to a mounting ring or hub or to each other with interlocking tabs that provide uniform separation and strengthening and do not block any significant amount of light.