John S Escher

US Patent:

56588100, Aug 19, 1997

Filed:

Nov 24, 1995

Appl. No.:

8/563432

Inventors:

Michael Dydyk - Scottsdale AZ
John S. Escher - Paradise Valley AZ

Assignee:

Motorola - Schaumburg IL

International Classification:

H01L 2182

US Classification:

438 49

Abstract:

A sensor (10, 40) for measuring the ratio of fluids or other materials in mixture (12) utilizes a coplanar resonator. The resonator has an outer conductor or conductor plane (17, 41) that is on a semiconductor substrate (11). The conductor plane (17, 41) has an opening (18, 48) that exposes a portion of the surface of the substrate. An inner conductor or sensing element (19, 42) is formed on the exposed surface within the opening (18, 48) so that the conductor plane (17, 41) and the sensing element (19, 42) are coplanar. The sensing element (19, 42) is coupled to an input (22) of a transistor (21) to form an oscillator. The oscillator frequency varies as the ratio of materials in the mixture (12) varies.

US Patent:

55005438, Mar 19, 1996

Filed:

Apr 4, 1994

Appl. No.:

8/223068

Inventors:

Michael Dydyk - Scottsdale AZ
John S. Escher - Paradise Valley AZ

Assignee:

Motorola - Schaumburg IL

International Classification:

G01R 2704
H01L 2980

US Classification:

257277

Abstract:

A sensor (10, 40) for measuring the ratio of fluids or other materials in mixture (12) utilizes a coplanar resonator. The resonator has an outer conductor or conductor plane (17, 41) that is on a semiconductor substrate (11). The conductor plane (17, 41) has an opening (18, 48) that exposes a portion of the surface of the substrate. An inner conductor or sensing element (19, 42) is formed on the exposed surface within the opening (18, 48) so that the conductor plane (17, 41) and the sensing element (19, 42) are coplanar. The sensing element (19, 42) is coupled to an input (22) of a transistor (21) to form an oscillator. The oscillator frequency varies as the ratio of materials in the mixture (12) varies.