John Andrew Mattson

US Patent:

58150544, Sep 29, 1998

Filed:

May 27, 1997

Appl. No.:

8/863404

Inventors:

Bruce Vojak - Wheaton IL
Jiashi Yang - Schaumburg IL
Jin Huang - Hoffman Estates IL
John Mattson - Palatine IL

Assignee:

Motorola Inc. - Schaumburg IL

International Classification:

H03H 9205
H03H 956

US Classification:

333191

Abstract:

A high frequency acoustic wave piezoelectric device (10) having parallel etched channels cut into a surface of a piezoelectric substrate so as to form micromachined ridges (20). Top electrodes (30) are located on tops (26) of the ridges (20) and bottom electrodes (32) are located on bottoms of the channels in spacings (22) between ridges (20). The top and bottom electrodes (30, 32) are offset from each other and substantially non-opposing. The electrodes (30, 32) generate a sufficient vertical electrical field (38) when driven to cause the ridges (20) to resonate. A height (28) of the ridges (20) define the operating frequency. The ridges (20) can be made small enough to produce frequencies well over 100 MHz in a fundamental bulk acoustic wave mode.