John Curtis Moran

US Patent:

6605319, Aug 12, 2003

Filed:

Feb 11, 2002

Appl. No.:

10/074277

Inventors:

Jeffrey D. Chinn - Foster City CA
Yi-Hsing Chen - Sunnyvale CA
Robert Z. Bachrach - Burlingame CA
John Christopher Moran - Saratoga CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 1622

US Classification:

42725528, 42725535, 4273977, 4272557, 438396, 438455

Abstract:

The method of the invention involves depositing a plurality of thin layers of film, each layer having a thickness ranging from about 500 to about 2000. Low Pressure Chemical Vapor Deposition or other techniques known in the art maybe used to deposit each thin layer of film. The film is polysilicon or silicon-germanium, where the germanium content ranges from about 4% by weight to about 20% by weight germanium. A Rapid Thermal Anneal (âRTAâ) is performed on a deposited thin film layer to relieve residual film stress in at least that film layer. The use of RTA rather than furnace annealing permits much shorter annealing times. Optionally, but advantageously, hydrogen may be present during RTA to permit the use of lower processing temperatures, typically about 20% lower relative to a customary anneal. A series of film deposition/rapid thermal anneal cycles is used to produce the desired, nominal total thickness polysilicon film. This method is generally useful for producing polysilicon films in the range of from about 2 microns to about 20 microns.

US Patent:

6698991, Mar 2, 2004

Filed:

Mar 2, 2000

Appl. No.:

09/517227

Inventors:

Robert Z. Bachrach - Burlingame CA
John C. Moran - Saratoga CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B65G 4907

US Classification:

414217, 414939, 414940

Abstract:

A fabrication system is provided which includes a storage apparatus coupled perpendicularly to a branch transport aisle, and one or more environmentally controlled fabrication tools coupled parallel to the branch transport aisle. The fabrication tools can encompass single chamber units or larger cluster tools with sub mainframes. The storage apparatus has one or more load ports which allow transfer of wafer carriers to or from a factory transport agent. A tool loading platform is positioned to receive a wafer carrier from the storage apparatus and to enable the fabrication tool to access a wafer carrier positioned thereon. A plurality of fabrication tools may be coupled beside each other within the equipment set. Each of the plurality of fabrication tools is coupled to the storage apparatus so that a wafer or wafer carrier may be received from or transferred to a factory transport agent and may travel along the storage apparatus to any of the plurality of fabrication tools coupled thereto. A computer program allows input of the number of tools coupled to a storage apparatus, and adjusts wafer carrier delivery based thereon.

US Patent:

20090320819, Dec 31, 2009

Filed:

May 21, 2008

Appl. No.:

12/124372

Inventors:

Robert Z. Bachrach - Burlingame CA, US
Kaushal K. Singh - Santa Clara CA, US
Omkaram Nalamasu - San Jose CA, US
John Christopher Moran - Menlo Park CA, US

International Classification:

B28D 1/06
B26D 1/547

US Classification:

125 1602, 125 20, 836511, 977902

Abstract:

A wire saw for cutting hard materials includes a carbon nanotube fiber wire spun from carbon nanotubes. The carbon nanotube fiber wire may be made from a plurality of fibers, each fiber being spun from carbon nanotubes, the fibers being twisted together to form the wire. Furthermore, the wire may also include diamond particles, silicon carbide particles and/or extra carbon nanotubes to enhance the abrasive properties of the wire. A method is provided for slicing a silicon boule including: linearly translating a carbon nanotube fiber wire between rotating drums while maintaining the wire under tension; using a fixture, moving the silicon boule onto the moving tensioned wire, whereby the wire cuts into the silicon; delivering lubricating fluid to the surface of the silicon where contact is made with the wire; and collecting the lubricating fluid after it leaves the surface of the silicon.