- Cupertino CA, US John P. Staton - Livermore CA, US Jonathan M. Manzano - Sunnyvale CA, US Stephen P. Bathurst - Lafayette CA, US
International Classification:
B24B 41/06 B24B 41/00
Abstract:
Multi-port polishing fixture assemblies, pick and place bond heads, split holders, and conditioning methods are described. In an embodiment, a multi-port polishing fixture assembly includes a fixture base, a plurality of split holders fastenable to a perimeter surface with a plurality of kinematic plurality of kinematic clamps. The pick and place bond heads may be secured inside the plurality of split holders to reduce edge-fast polishing during conditioning of the distal bond surfaces of the pick and place bond heads.
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