Jonathan A Green

US Patent:

44686390, Aug 28, 1984

Filed:

Sep 29, 1982

Appl. No.:

6/426405

Inventors:

Jonathan B. Green - Palo Alto CA
Gordon S. Kino - Stanford CA

Assignee:

The United States of America as represented by the Secretary of the Navy - Washington DC

International Classification:

H03H 964
H03H 930
H03H 1502

US Classification:

333153

Abstract:

A novel technique for fabrication of a new class of surface acoustic wave (SAW) signal processing devices. Substrates of non-piezoelectric silicon or weakly piezoelectric gallium arsenide are prepared and a thin film of a piezoelectric material, such as zinc oxide, is deposited on the substrate. Interdigital transducers are fabricated at each end of the device to inject/receive SAW signals. A row of P-N diodes is constructed in the substrate underneath the SAW beam path and a metal electrode is deposited on top of the zinc oxide film. The diodes may be serially addressed/controlled by a variety of devices external to the SAW beam path, but fabricated on the same substrate and the new device used to provide transformation between high-frequency signals and low-frequency signals having the same time-bandwidth product.