Joon Hwan Cho

US Patent:

20120251943, Oct 4, 2012

Filed:

Mar 30, 2011

Appl. No.:

13/075749

Inventors:

M. Dalil Rahman - Flemington NJ, US
Douglas McKenzie - Easton PA, US
Jianhui Shan - Pennington NJ, US
Joon Yeon Cho - Bridgewater NJ, US
Salem K. Mullen - Florham Park NJ, US

International Classification:

G03F 7/20
G03F 7/004
C09K 3/00

US Classification:

4302701, 252582, 430311

Abstract:

The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1):where A is a fused aromatic ring, B has a structure (2), and C is a hydroxybiphenyl of structure (3)where Ris C-Calkyl and Ris C-Calkyl.The invention further relates to a process for forming an image using the composition.