Joseph R Michael

US Patent:

53003071, Apr 5, 1994

Filed:

Sep 14, 1992

Appl. No.:

7/944865

Inventors:

Darrel R. Frear - Albuquerque NM
Joseph R. Michael - Albuquerque NM
Alton D. Romig - Albuquerque NM

Assignee:

The United States of America as represented by the United States
Department of Energy - Washington DC

International Classification:

B05D 512

US Classification:

427 96

Abstract:

A process for the forming of Al-Cu conductive thin films with reduced electromigration failures is useful, for example, in the metallization of integrated circuits. An improved formation process includes the heat treatment or annealing of the thin film conductor at a temperature within the range of from 200. degree. C. to 300. degree. C. for a time period between 10 minutes and 24 hours under a reducing atmosphere such as 15% H. sub. 2 in N. sub. 2 by volume. Al-Cu thin films annealed in the single phase region of a phase diagram, to temperatures between 200. degree. C. and 300. degree. C. have. theta. -phase Al. sub. 2 Cu precipitates at the grain boundaries continuously become enriched in copper, due, it is theorized, to the formation of a thin coating of. theta. -phase precipitate at the grain boundary. Electromigration behavior of the aluminum is, thus, improved because the. theta.

US Patent:

63266199, Dec 4, 2001

Filed:

Apr 26, 1999

Appl. No.:

9/299940

Inventors:

Joseph R. Michael - Albuquerque NM
Raymond P. Goehner - Albuquerque NM
Max E. Schlienger - Albuquerque NM

Assignee:

Sandia Corporation - Albuquerque NM

International Classification:

H01J 3726

US Classification:

250310

Abstract:

A method and apparatus for determining the crystalline phase and crystalline characteristics of a sample. This invention provides a method and apparatus for unambiguously identifying and determining the crystalline phase and crystalline characteristics of a sample by using an electron beam generator, such as a scanning electron microscope, to obtain a backscattered electron Kikuchi pattern of a sample, and extracting crystallographic and composition data that is matched to database information to provide a quick and automatic method to identify crystalline phases.