Julie Rosado Krauss

US Patent:

20060131588, Jun 22, 2006

Filed:

Oct 9, 2001

Appl. No.:

10/398329

Inventors:

Dieter Gruen - Downers Grove IL, US
Olando Auciello - Bollingbrook IL, US
Greg Swain - East Lansing MI, US
Ming Ding - Beijing, CN
John Carlisle - Plainfield IL, US
Alan Krauss - Naperville IL, US
Julie Krauss - Naperville IL, US

International Classification:

H01L 31/0312

US Classification:

257077000

Abstract:

An electrode having a surface of an electrically conducting ultrananocrystalline diamond having not less than 10atoms/cmnitrogen with an electrical conductivity at ambient temperature of not less than about 0.1 (Ωcm)is disclosed as is a method of remediating toxic materials with the electrode. An electron emission device incorporating an electrically conducting ultrananocrystalline diamond having not less that 10atoms/cmnitrogen with an electrical conductivity at ambient temperature of not less than about 0.1 (Ωcm)is disclosed.

US Patent:

20040129202, Jul 8, 2004

Filed:

Nov 8, 2002

Appl. No.:

10/169879

Inventors:

Dieter Gruen - Downers Grove IL, US
Hans-Gerd Busmann - Bremen, DE
Eva-Maria Meyer - Bremen, DE
Orlando Auciello - Bolingbrook IL, US
Alan Krauss - Naperville IL, US
Julie Krauss - Naperville IL, US

International Classification:

C30B007/00
C30B021/02
C30B028/06
C30B023/00
C30B025/00
C30B028/12
C30B028/14

US Classification:

117/068000

Abstract:

MEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron. The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.