Karl J Urquhart

US Patent:

6799883, Oct 5, 2004

Filed:

Dec 20, 1999

Appl. No.:

09/468411

Inventors:

Karl J. Urquhart - McKinney TX
John B. Thompson - Sherman TX
Joe G. Hoffman - Dallas TX

Assignee:

Air Liquide America L.P. - Houston TX

International Classification:

B01F 1504

US Classification:

3661524, 3661521, 137 3, 137 5

Abstract:

Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of: mixing a first chemical stream with a second chemical stream in a controlled manner, to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.

US Patent:

7344297, Mar 18, 2008

Filed:

Apr 15, 2005

Appl. No.:

11/107494

Inventors:

Karl J. Urquhart - Mc Kinney TX, US

Assignee:

Air Liquide Electronics U.S. LP - Houston TX

International Classification:

B01F 15/02

US Classification:

366132, 366134, 366136, 3661521, 3661523, 3661524, 366141, 137 4, 137 5, 137 92, 137 93

Abstract:

The invention is a method and apparatus for asynchronous blending and supply of chemical solutions. The method of the present invention includes a continuous blending system. This continuous blending system monitors the output and continuously adjusts the blending system to achieve a predetermined formulation of at least a first solution. A centralized monitoring system continuously evaluates the solutions and adjusts the output of the blender as needed to maintain the predetermined formulation of the solution. The system includes at least a first tank system. Any solutions that are delivered from this tank system are also continuously monitored, evaluated, and adjusted as needed by the centralized monitoring system.

US Patent:

7871249, Jan 18, 2011

Filed:

Oct 12, 2006

Appl. No.:

11/549094

Inventors:

Karl J. Urquhart - Allen TX, US
Georges Guarneri - Le Versoud, FR
Jean-Louis Marc - La Redorte, FR
Norbert Fanjat - Plano TX, US
Laurent Langellier - Dallas TX, US
Christophe Colin - Plano TX, US

Assignee:

Air Liquide Electronics U.S. LP - Dallas TX
Air Liquide Electronics Systems SA - Paris

International Classification:

F04C 19/00
C03C 25/68
B01F 15/02

US Classification:

417 68, 216 84, 366132, 366136, 3661511

Abstract:

Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

US Patent:

7980753, Jul 19, 2011

Filed:

Oct 12, 2006

Appl. No.:

11/549104

Inventors:

Karl J. Urquhart - Allen TX, US
Georges Guarneri - Le Veroud, FR
Jean-Louis Marc - Le Redorte, FR
Norbert Fanjat - Plano TX, US
Laurent Langellier - Dallas TX, US
Christophe Colin - Plano TX, US

Assignee:

Air Liquide Electronics U.S. LP - Dallas TX
Air Liquide Electronics Systems SA - Paris

International Classification:

B01F 5/10

US Classification:

366132, 366142, 417 68

Abstract:

Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

US Patent:

8317388, Nov 27, 2012

Filed:

May 24, 2011

Appl. No.:

13/114832

Inventors:

Karl J. Urquhart - Allen TX, US
Georges Guarneri - Le Versoud, FR
Jean-Louis Marc - La Redorte, FR
Norbert Fanjat - Menlo Park CA, US
Laurent Langellier - Shanghai, CN
Christophe Colin - Dreux, FR

Assignee:

Air Liquide Electronics U.S. LP - Dallas TX
Air Liquide Electronics Systems - Paris

International Classification:

B01F 5/10

US Classification:

366132, 366142, 417 68

Abstract:

Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

US Patent:

20020085447, Jul 4, 2002

Filed:

Feb 9, 2001

Appl. No.:

09/779470

Inventors:

David Snyder - Princeton TX, US
Karl Urquhart - McKinney TX, US
Richard Swindell - Bonham TX, US

International Classification:

B01F015/04

US Classification:

366/136000, 366/152100, 366/152400

Abstract:

On-site blending and distribution of oxide abrasives with other constituents as used in semiconductor applications. Constituent blending is accomplished through weighing components individually into a blending tank. Some components may be added by injection or weight. Alternatively blends can be made to varying concentrations by passing the blended oxide solution in a closed circulation loop through a calibrated encapsulated torroid coil to measure electrical conductivity. The resulting conductivity output may be used to add one or more component.

US Patent:

20020190002, Dec 19, 2002

Filed:

Apr 4, 2001

Appl. No.:

09/824771

Inventors:

Karl Urquhart - McKinney TX, US
Joe Hoffman - Dallas TX, US
David Snyder - Princeton TX, US
Vinod Raghavan - Dallas TX, US
Mary Havlicek - Richardson TX, US
John Geurian - Garland TX, US

International Classification:

B01D015/00

US Classification:

210/683000, 210/284000

Abstract:

Provided are cartridges, apparatuses and methods for purifying a liquid chemical. The cartridges include a conduit connected to receive a flow of a chemical to be purified. A packed section in the conduit comprises a purification material. The ratio of the length of the packed section to the inside diameter of the conduit is from about 8:1 to about 200:1. The flow of the chemical to be purified contacts the purification material, thereby producing a flow of a purified chemical. This invention has particular applicability to the semiconductor manufacturing industry.

US Patent:

20050029170, Feb 10, 2005

Filed:

Sep 13, 2004

Appl. No.:

10/939570

Inventors:

Karl Urquhart - McKinney TX, US
John Thompson - Sherman TX, US
Joe Hoffman - Dallas TX, US

International Classification:

B01D017/12

US Classification:

210096100, 210101000, 137003000, 137093000, 438005000, 366348000, 366132000, 366134000

Abstract:

Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of: mixing a first chemical stream with a second chemical stream in a controlled manner, to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.