- Gaithersburg MD, US ROBERT R. KELLER - LOUISVILLE CO, US KATHERINE P. RICE - FITCHBURG WI, US
International Classification:
G01N 21/03
Abstract:
A detector mask transmits selectively a plurality of probe particles to a particle detector, the detector mask includes: a plate including a plate wall disposed in the plate and enclosing a transmission orifice arranged in a transmission profile to: transmit probe particles having a trajectory coincident with the transmission orifice, block probe particles having a trajectory external to the transmission orifice, and form a probe particle beam comprising the probe particles transmitted by the transmission orifice to the particle detector, wherein the transmission profile includes a sector, a semi-circle, an annular sector, or a combination including at least one of the foregoing first transmission profiles.
- Gaithersburg MD, US ROBERT R. KELLER - LOUISVILLE CO, US KATHERINE P. RICE - FITCHBURG WI, US
International Classification:
G01N 21/03
Abstract:
A detector mask transmits selectively a plurality of probe particles to a particle detector, the detector mask includes: a plate including a plate wall disposed in the plate and enclosing a transmission orifice arranged in a transmission profile to: transmit probe particles having a trajectory coincident with the transmission orifice, block probe particles having a trajectory external to the transmission orifice, and form a probe particle beam comprising the probe particles transmitted by the transmission orifice to the particle detector, wherein the transmission profile includes a sector, a semi-circle, an annular sector, or a combination including at least one of the foregoing first transmission profiles.
Lena Mason, Nick Collins, Matthew Ashburn, Josue Farina, Lance O'dea, Candace Hughes, Dawn Patton, Patricia Bolen, Julie Schoemaker, Jason Johnson, Chasity Patton