Kathleen F Hanson

US Patent:

20150186196, Jul 2, 2015

Filed:

Mar 12, 2015

Appl. No.:

14/645975

Inventors:

- Billerica MA, US
Kathleen L. Hanson - Savage MN, US
Steven E. Haumersen - Woodbury MN, US
Thomas D. Johnson - Star Prairie WI, US
Clari Nolet - Los Altos CA, US
William Smeaton - Edina MN, US

Assignee:

ENTEGRIS, INC - Billerica MA

International Classification:

G06F 11/00
B67D 1/12
G01M 99/00

Abstract:

Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.