According to one embodiment, a pellicle includes first and second frame members that are selectively removable from one another. The second frame member has an annular shape similar to and is physically coupled to an outer periphery of a transparent membrane. The second frame member configured to be selectively coupled to the first frame member from a engaged position adjacent to the first frame member to a disengaged position in which the second frame member is separated from the first frame member.
Multi-Level Stack Having Multi-Level Contact And Method
A method for forming a multi-level stack having a multi-level contact is provided. The method includes forming a multi-level stack comprising a specified number, n, of conductive layers and at least n−1 insulating layers. A via formation layer is formed over the stack. A first via is etched in the via formation layer at a first edge of the stack. A first multi-level contact is formed in the first via. For a particular embodiment, a second via may be etched in the via formation layer at a second edge of the stack and a second multi-level contact may be formed in the second via.
A semiconductor device fabrication method in which a conductive interconnect is formed over a semiconductor substrate. First and second dielectric films are formed over the interconnect. A first patterning layer is formed over the second dielectric. A via opening is then formed in the first patterning layer and a second patterning layer is formed over the first patterning layer. A trench opening is defined in the second patterning layer. A first portion of the second dielectric film exposed by the trench opening is removed to define a via pattern. A portion of the first patterning layer exposed by the second patterning layer is then removed to expose a second portion of the second dielectric film, which is then removed to define a trench portion of a dual inlaid opening in the second dielectric. A portion of the first dielectric film defined by the via pattern is then removed to expose the conductive region.
Multi-Level Stack Having Multi-Level Contact And Method
- Gyeonggi-do, KR - Austin TX, US Keith Lao - Austin TX, US
International Classification:
H01L 21/768 H01L 23/522
Abstract:
A method for forming a multi-level stack having a multi-level contact is provided. The method includes forming a multi-level stack comprising a specified number, n, of conductive layers and at least n-1 insulating layers. A via formation layer is formed over the stack. A first via is etched in the via formation layer at a first edge of the stack. A first multi-level contact is formed in the first via. For a particular embodiment, a second via may be etched in the via formation layer at a second edge of the stack and a second multi-level contact may be formed in the second via.
Forming Vias And Trenches For Self-Aligned Contacts In A Semiconductor Structure
A semiconductor structure is formed to include a non-conductive layer with at least one metal line, a first dielectric layer, a first stop layer, a second dielectric layer, a second stop layer, a third stop layer and a fourth stop layer. A first photoresist layer is formed over the upper stop layer to develop at least one via pattern. The structure is selectively etched to form the via pattern in the third stop layer through the fourth stop layer. The first photoresist layer is then removed. A second photoresist layer is formed over the upper stop layer to develop a plurality of trench patterns, each of the trench pattern comprising a via-trench portion in which the trench pattern is formed above the via pattern, and a trench portion that is remaining part of the trench pattern.
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