Medical School University of Utah School of Medicine Graduated: 1984
Description:
Dr. Funk graduated from the University of Utah School of Medicine in 1984. He works in Burley, ID and 3 other locations and specializes in Diagnostic Radiology and Radiology. Dr. Funk is affiliated with Alta View Hospital, Cassia Regional Medical Center, Davis Hospital & Medical Center, Intermountain McKay-Dee Hospital Center, Intermountain Medical Center, Jordan Valley Medical Center and
The present invention is directed to a control system for a photolithographic integrated circuit manufacturing process. The control system incorporates a visual gating device in which a series of nests are provided. A barcode reader may be provided in conjunction with some of the nests. In operation, a human operator advances wafer lot boxes through the nest positions in accordance with a series of displays which are controlled by the control system. The barcode reader associated with each nest reads a barcode label on the wafer lot box contained within the nest to determine the lot number corresponding to the lot box. This lot number is then used by the control system to obtain setup parameters for the various photolithographic manufacturing process operations.
Apparatus And Method For Manufacturing Integrated Circuit Devices
The present invention is directed to a control system for a photolithographic integrated circuit manufacturing process. The control system incorporates a visual gating device in which a series of nests are provided. A barcode reader may be provided in conjunction with some of the nests. In operation, a human operator advances wafer lot boxes through the nest positions in accordance with a series of displays which are controlled by the control system. The barcode reader associated with each nest reads a barcode label on the wafer lot box contained within the nest to determine the lot number corresponding to the lot box. This lot number is then used by the control system to obtain setup parameters for the various photolithographic manufacturing process operations.