Kevin Eugene Walters

US Patent:

20120006809, Jan 12, 2012

Filed:

Jun 23, 2011

Appl. No.:

13/167479

Inventors:

Pavel Sergey Kobyakov - Fort Collins CO, US
Walajabad S. Sampath - Fort Collins CO, US
Kevin Eugene Walters - Milliken CO, US

Assignee:

COLORADO STATE UNIVERSITY RESEARCH FOUNDATION - Fort Collins CO

International Classification:

H05B 3/06
B28B 1/087
C04B 35/653

US Classification:

219542, 264332, 264 71

Abstract:

Systems, apparatus and methods for in-line evaporative deposition are described herein that include a nickel chromium wire based heating system that can reach desired operating temperatures while providing opportunities for improved temperature uniformity and energy usage. In some embodiments, an apparatus includes a base member configured to be used as a sublimation crucible and the base member defines a channel in a surface of the base member. A first layer of electrically insulating material is disposed within the channel and has a substantially uniform thickness. A heater coil is disposed within the channel such that the first layer of electrically insulating material is disposed between the heater coil and the surface of the base. A second layer of electrically insulating material is disposed on the heater coil such that the heater coil is disposed between the first layer of electrically insulating material and the second layer of electrically insulating material.

US Patent:

20120322198, Dec 20, 2012

Filed:

Jun 18, 2012

Appl. No.:

13/526383

Inventors:

Pavel S. Kobyakov - Fort Collins CO, US
W. S. Sampath - Fort Collins CO, US
Kevin E. Walters - Milliken CO, US
Jason M. Kephart - Fort Collins CO, US
Keegan Barricklow - Fort Collins CO, US

International Classification:

H01L 31/18

US Classification:

438 95, 257E31015

Abstract:

A method for sublimating a thin film of Magnesium (Mg) on a semiconductor structure for improved efficiency is described. One embodiment includes a method comprised of providing a semiconductor substrate in a vacuum chamber, wherein the substrate comprises a window layer and an absorber layer made of CdTe. The method further includes heating the substrate to a diffusion temperature or greater followed by depositing a Mg film on the absorber layer using a sublimation process, wherein at least a portion of the Mg forms a CdMgTe alloy within the absorber layer.

US Patent:

20130183793, Jul 18, 2013

Filed:

Jan 3, 2013

Appl. No.:

13/733716

Inventors:

Colorado State University Research Foundation - Fort Collins CO, US
Pavel S. Kobyakov - Fort Collins CO, US
Kevin E. Walters - Milliken CO, US
Davis R. Hemenway - Fort Collins CO, US

Assignee:

COLORADO STATE UNIVERSITY RESEARCH FOUNDATION - Fort Collins CO

International Classification:

H01L 31/18

US Classification:

438 95, 118725

Abstract:

Systems and methods for depositing complex thin-film alloys on substrates are provided. In particular, systems and methods for the deposition of thin-film CdMTe ternary alloys on substrates using a stacked-source sublimation system are provided, where M is a metal such as Mg, Zn, Mn, and Cu.

US Patent:

20140205768, Jul 24, 2014

Filed:

Apr 7, 2014

Appl. No.:

14/246935

Inventors:

- Fort Collins CO, US
Pavel S. Kobyakov - Fort Collins CO, US
Kevin E. Walters - Milliken CO, US
Davis R. Hemenway - Fort Collins CO, US

Assignee:

Colorado State University Research Foundation - Fort Collins CO

International Classification:

C23C 16/452

US Classification:

427561

Abstract:

Systems and methods for depositing complex thin-film alloys on substrates are provided. In particular, systems and methods for the deposition of thin-film CdMTe ternary alloys on substrates using a stacked-source sublimation system are provided, where M is a metal such as Mg, Zn, Mn, and Cu.