Kristi L. James - Phoenix AZ A. L. Shields - Scottsdale AZ
Assignee:
Motorola, Inc. - Schaumburg IL
International Classification:
C23F 102 B44C 122 C03C 1500 C03C 2506
US Classification:
1566591
Abstract:
A solution is disclosed for the one-step etching of a three layer titanium-nickel-copper metallization. The etch solution comprises about 1. 8 to 2. 0 moles/liter hydrofluoric acid, about 2. 5 to 4. 0 moles/liter acetic acid, about 8. 7 to 9. 0 moles/liter nitric acid, and balance water. Use of the solution permits the patterned etching of sequential layers of titanium, nickel, and copper without excessive attack of underlying silicon dioxide layers.
A new wire bonding capillary design is employed in which the bonding and cutting surfaces of the bonding capillary are separated. The bonding capillary tip has an annular bonding surface and an annular cutting ridge raised from the bonding surface and of smaller diameter.
Youtube
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