Larry R Stewart

US Patent:

7220383, May 22, 2007

Filed:

Feb 28, 2002

Appl. No.:

10/086025

Inventors:

Marc R. Anderson - Santa Clara CA, US
Larry N. Stewart - San Jose CA, US
Howard M. Kingston - Pittsburgh PA, US

Assignee:

Metara, Inc. - Sunnyvale CA

International Classification:

G01N 33/20
G01N 30/72
B01D 59/44
H01J 49/26

US Classification:

422 62, 250281, 250282, 250287, 422 681, 422 81, 436 43, 436 50, 436 56, 436 73, 436 79, 436 80, 436 81, 436 82, 436 83, 436 84, 436173, 436174, 436179, 436181, 436182

Abstract:

An analytical apparatus to monitor fluid systems has at least one extraction module having a raw-sample reservoir connected by input fluid conduit to individual ones of said fluid systems, to extract raw samples for analysis from said fluid systems, one or more modification modules comprising additive materials to modify the extracted raw samples prior to analysis, an analytical device to receive at least a portion of said raw samples in an ordered sequence, and to determine concentration of at least one constituent of said sample portion, fluid-handling apparatus for transferring fluid through the analytical apparatus, and a computerized control and management system to manage operations of component modules and devices, and to report analytical results. The apparatus is characterized in that the control and management system coordinates extraction of raw samples, modification as needed, introduction of fluids to the analytical device, and reporting of analytical results on a continuous basis over plural cycles.

US Patent:

7531134, May 12, 2009

Filed:

Mar 8, 2002

Appl. No.:

10/094394

Inventors:

Marc R. Anderson - Santa Clara CA, US
Michael J. West - Sunnyvale CA, US
Howard M. Kingston - Pittsburgh PA, US
Larry N. Stewart - San Jose CA, US

Assignee:

Metara, Inc. - Sunnyvale CA

International Classification:

G01N 33/20
G01N 33/44
G01N 30/72
B01D 59/44
H01J 49/26

US Classification:

422 62, 250281, 250282, 422 681, 422 81, 436 43, 436 52, 436 53, 436 56, 436 73, 436 79, 436 80, 436 81, 436 82, 436 83, 436 84, 436 85, 436173, 436174, 436179, 436182

Abstract:

A method of directed automated analysis of a plurality of analytes of a process solution includes providing a sample of the process solution containing a plurality of the analytes, admixing an enriched isotope spike for each of the plurality of analytes to be analyzed with the process solution sample thereby effecting admixture of the enriched ratio of isotopes with the naturally occurring ratio of each analyte to be analyzed, creating ions from the spikes, introducing the ions into a mass spectrometer for determination of the identity and quantity of each analyte and delivering the information to a microprocessor. If desired, the process solution sample may be diluted and/or subjected to the addition of reagents or standards prior to initiation of the analysis. The ions may be created by an atmospheric pressure ionization interface. The information obtained is processed in a computer which serves to control other portions of the practice of the method.

US Patent:

20060166370, Jul 27, 2006

Filed:

Oct 31, 2005

Appl. No.:

11/263150

Inventors:

Thomas Bailey - San Jose CA, US
Michael West - San Jose CA, US
Larry Stewart - San Jose CA, US

International Classification:

G01N 24/00

US Classification:

436173000

Abstract:

In one embodiment, a method of analyzing a semiconductor processing solution having at least one organic additive includes the acts of: (a) spiking a sample of the semiconductor processing solution with a first spike corresponding to the at least one organic additive and a second spike corresponding to at least one organic breakdown product of the organic additive; (b) processing the sample through a mass spectrometer to form an organic additive response, a first spike response, a breakdown response, and a second spike response; and (c) in a processor, calculating a concentration of the at least one organic additive using a ratio measurement derived from the organic additive response and the first spike response and calculating a concentration of the at least one organic breakdown product using a ratio measurement derived from the breakdown response and the second spike response.

US Patent:

20060169030, Aug 3, 2006

Filed:

Dec 9, 2005

Appl. No.:

11/298738

Inventors:

Larry Stewart - San Jose CA, US
James Garvey - San Jose CA, US
Jimmy Dzuong - San Jose CA, US
Bijan Ghaderi - San Mateo CA, US
Christopher Janko - Redwood City CA, US

International Classification:

G01N 11/00

US Classification:

073053010

Abstract:

In one embodiment, an in-process mass spectrometry (IPMS) system is provided that includes: a plurality of sample mix modules, each sample mix module operable to select an extracted sample from a corresponding plurality of sample extraction modules, wherein each sample extraction module is operable to extract sample from a corresponding process solution bath having at least one analyte, each sample mix module being further operable to mix the selected extracted sample with a spike solution to form a mixture; a mass spectrometer operable to process the mixture from each sample mix module to form a mass spectral response having a spike response and an analyte response; and at least one processor operable to control the pluralities of sample extraction modules, the pluralities of sample mix modules, and the mass spectrometer such that the sample extraction modules automatically extract samples, the plurality of sample mix modules automatically mix the selected extracted samples with spike solution, and the mass spectrometer automatically process the mixtures, the at least one processor being further operable to characterize the concentration of the at least one analyte based upon a ratio measurement derived from the spike response and the analyte response.

US Patent:

20070141720, Jun 21, 2007

Filed:

Dec 16, 2005

Appl. No.:

11/305624

Inventors:

Larry Stewart - San Jose CA, US
Jimmy Dzuong - San Jose CA, US
Harmesh Saini - Santa Clara CA, US
Quoc Truong - San Leandro CA, US
Hien Nguyen - San Jose CA, US
Michael Ahern - Mountain View CA, US
Bijan Ghaderi - San Mateo CA, US

International Classification:

G01N 1/18

US Classification:

436178000

Abstract:

In one embodiment, a matrix elimination apparatus for eliminating an acidic matrix includes: at least one column packed with a weak anion exchange resin; a source of samples, each sample having an acidic matrix; a basic solution source; a weakly acidic metal complexing reagent source, and an at least one pump, wherein the matrix elimination apparatus is configured such that the at least one pump can sequence through the acts of: a) pumping the basic solution through the column to regenerate the column, b) pumping the weakly acid metal complexing reagent through the column to activate the column; and c) pumping one of the samples through the activated column to provide a processed sample whose acidic matrix is eliminated.