Larry Brent Vaughan

US Patent:

20190287832, Sep 19, 2019

Filed:

Mar 13, 2018

Appl. No.:

15/920437

Inventors:

- Suwon-si, KR
Larry E. VAUGHAN - Austin TX, US

International Classification:

H01L 21/673
C23C 16/34
C23C 16/458

Abstract:

A vertical wafer boat has an upper boat segment and a lower boat segment, with the upper boat segment configured to removably mount on the lower boat segment, and to receive one or more semiconductor substrates. The lower boat segment includes a top plate, a first set of adiabatic plates, and a second set of adiabatic plates. One or more posts connect the top plate, the first set of adiabatic plates, and the second set of adiabatic plates. The first set of adiabatic plates include a first set of gaps separating a first plurality of sections; the second set of adiabatic plates include a second set of gaps separating a second plurality of sections; and the first set of adiabatic plates and the second set of adiabatic plates are interleaved.

Address:

6109 Westerley Dr, Plano, TX 75093

VIN:

5LCJF162671012625

Make:

Lincoln

Model:

Navigator L 2WD 4dr

Year:

2007