Lawrence T Wong

US Patent:

20130284369, Oct 31, 2013

Filed:

Oct 1, 2012

Appl. No.:

13/632302

Inventors:

Lawrence Wong - Fremont CA, US
Jonathan Liu - Sunnyvale CA, US
Yang Yang - Sunnyvale CA, US
Kartik Ramaswamy - San Jose CA, US
Shahid Rauf - Pleasanton CA, US
Shane C. Nevil - Livermore CA, US
Kallol Bera - San Jose CA, US
Kenneth S. Collins - San Jose CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

C23C 16/505
B05C 9/00

US Classification:

15634526, 118712

Abstract:

Plasma distribution is controlled in a plasma reactor by controlling the phase difference between opposing RF electrodes, in accordance with a desired or user-selected phase difference, by a phase-lock feedback control loop.

US Patent:

20160116518, Apr 28, 2016

Filed:

Oct 28, 2015

Appl. No.:

14/924954

Inventors:

- Santa Clara CA, US
LAWRENCE WONG - Fremont CA, US
KARTIK RAMASWAMY - San Jose CA, US
CHUNLEI ZHANG - Saratoga CA, US

International Classification:

G01R 29/24
H01L 21/683

Abstract:

Methods and apparatus for measurement of a surface charge profile of an electrostatic chuck are provided herein. In some embodiments, an apparatus for measurement of a surface charge profile of an electrostatic chuck includes: an electrostatic charge sensor disposed on a substrate to obtain data indicative of an electrostatic charge on an electrostatic chuck; and a transmitter disposed on the substrate and having an input in communication with an output of the electrostatic charge sensor to transmit the data.

US Patent:

20160048766, Feb 18, 2016

Filed:

Aug 13, 2014

Appl. No.:

14/458575

Inventors:

- Westport CT, US
Lawrence Wong - San Francisco CA, US
Erin Culek - Chicago IL, US
Matthew Burriesci - Half Moon Bay CA, US
Martin Lee - Sunnyvale CA, US
Bo Han - Mountain View CA, US

International Classification:

G06N 5/04
G06N 99/00

Abstract:

A method and system for making financial or medical decisions. The method comprises training sets of models using classification training with sets of data derived from segregated data sources. Overall weighting of each model within the sets of models are determined for each of the sub-datasets. The sets of models, the overall weighting of each model and a number of examples provided from the data for each of the datasets are transmitted to a central server over a communication network, wherein the central server is configured to determine the relative weights of each of the sets of models in the overall ensemble model based on the number of examples, combine the sets of models, receive new application data, and predict at least one of outcome variables, an uncertainty factor for the variables, and drivers of the outcome variables based on the new application data.